Laser-assisted manufacturing for sensors

Abstract The laser-assisted manufacturing technology has significant advantages in meeting various demands such as complex structures, functional integration, customized devices, and cost-effectiveness, which makes it a highly attractive option for fabricating sensors. In this review, the latest advancements and strategies in intelligent sensor development through laser processing were surveyed and outlined following the interaction of laser and materials. Laser-assisted manufacturing technologies have been extensively applied in materials science and device processing. Firstly, laser technology can be utilized in a wide range of materials, encompassing carbon-based materials, metals, and metallic oxides. In the field of device scale processing, laser manufacturing is widely used in micro/nano structures, planar device construction, and stereoscopic electronic devices such as cutting, engraving, and lithography. Additionally, laser technology provides robust support for sensor applications, covering fields such as pressure sensing, temperature sensing, gas sensing, and biosensors. Furthermore, laser considerably serves in real application areas such as multifunctional sensing systems, actuators, and robots. The widespread application of laser manufacturing technology in sensor platform fabrication offers effective solutions for realizing the miniaturization, multifunctionality, and integration of sensors.