journal article·2003-10

Evaluating Micromechanical Properties at Surfaces Using Nanoindentation with Finite-Element Modeling

J. A. Knapp, D. M. Follstaedt, S. M. Myers

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Abstract

Detailed finite-element modeling of nanoindentation data is used to obtain accurate mechanical properties of very thin films or surface-modified layers independently of the properties of the underlying substrates. These procedures accurately deduce the yield strength, elastic modulus, and layer hardness, and greatly increase the usefulness of indentation testing with very thin surface layers. Moreover, extraction of the effective Young's modulus in the near surface region should enable mechanical damage studies on a small scale. This paper presents a brief overview of the procedures involved and illustrates them with He-implanted Ni.
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Research context

OpenAlex topics: Metal and Thin Film Mechanics · Diamond and Carbon-based Materials Research · Advanced materials and composites

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Affiliations

Radiation Solid Interactions and Processing Department, Sandia National Laboratories, Albuquerque, NM 87185-1056, USA

References (20)

Show source-provided references
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