DataVXInternational Journal of Applied Ceramic TechnologyPaper
journal article·2015-11

Research on a Micro Piezoelectric Gyroscope with Concentrated Rocking‐Mass

Yuxiang Cheng, Weiping Zhang, Jian Tang, Wu Liu, Yinghai Wang, Wenyuan Chen

International Journal of Applied Ceramic Technology· Volume 12· Issue S3
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Source abstract

Abstract

This study introduces a Micro Electro Mechanical Systems ( MEMS ) piezoelectric gyroscope with a concentrated rocking‐mass, made from PZT ceramic. The gyroscope operates in the rocking mode with a frequency of 91.3 kHz. This gyroscope follows the study of the MEMS piezoelectric BAW gyroscope with an improvement of fewer boundary constraints, which enhances the device's operability and characteristic. Through the MEMS fabrication process, the device with a side of length 12 mm achieves a rate sensitivity of 30.7 μV/°/s and a bias stability of 8.6°/s. This study describes the design, fabrication, circuit system, and characteristics of this micro piezoelectric gyroscope.
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Research context

Ceramics & glasses

OpenAlex topics: Advanced MEMS and NEMS Technologies · Acoustic Wave Resonator Technologies · Mechanical and Optical Resonators

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

National Key Laboratory of Science and Technology on Micro/Nano Fabrication Laboratory Laboratory for Thin Film and Micro Fabrication of the Ministry of Education Shanghai Key Lab of Navigation and Location‐based Services Department of Micro‐Nano Electronics School of Electronic Information and Electrical Engineering Shanghai Jiao Tong University Shanghai 200240 China

Funding

Special the New Century Excellent Talents Support Program of Ministry of Education · National Key Laboratory of Science and Technology on Nano/Micro Fabrication · Pre-Research Fund · Science Fund Program

References (9)

Show source-provided references
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