Microfabrication of Three‐Dimensional Photonic Crystals of SiO 2 –Al 2 O 3 Ceramics and Their Terahertz Wave Properties
Source abstract
Abstract
Dense three‐dimensional microphotonic crystals of SiO 2 –Al 2 O 3 ceramics were fabricated using microstereolithography and successive sintering process. The forming dimensional tolerance for a 50 vol% ceramic paste is 10 μm and sintering shrinkage is around 12%. Diamond‐type photonic crystals with lattice constants of 500 and 125 μm were formed and sintered successfully. The band gaps of the samples were measured and compared with the theoretically calculated band diagram.
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Research context
OpenAlex topics: Photonic Crystals and Applications · Photonic and Optical Devices · Plasmonic and Surface Plasmon Research
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