Manufacturing and Characterization of a Deformable Membrane with Integrated Temperature Sensors and Heating Structures in Low Temperature Co‐fired Ceramics
Source abstract
Abstract
In this article, the challenging manufacturing process of a deformable mirror for the wave front correction of a high energy laser is described. During this process, the low temperature co‐fired ceramic ( LTCC ) membrane as the base component with integrated sensors must endure several postfire processes at temperatures of up to 900°C without any degradation of the sensors' characteristics. To optimize the sensors, various combinations of resistor and conductor pastes and different geometries are characterized. The usability and the performance of the sensor elements after temperature treatment are investigated by measuring the resistance and its resistance temperature characteristic.
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Research context
OpenAlex topics: Electrical and Thermal Properties of Materials · Ferroelectric and Piezoelectric Materials · Advanced Sensor Technologies Research
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Affiliations
Department of Electronics Technology, Institute for Micro‐ and Nanotechnologies Ilmenau University of Technology 98693 Ilmenau Germany
Fraunhofer Institute for Applied Optics and Precision Engineering 07745 Jena Germany
Fraunhofer Institute for Ceramic Technologies and Systems 01277 Dresden Germany
References (7)
Show source-provided references
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