Preliminary Model and Technology of Piezoelectric Low Temperature Co‐fired Ceramic ( LTCC ) Uniaxial Accelerometer
Source abstract
Abstract
Design procedure, technology and basic properties of a piezoelectric Low Temperature Co‐fired Ceramics ( LTCC ) accelerometer are presented in this paper. The sensor consists of a LTCC membrane with a seismic mass. Meggitt InSensor ® PZT thick film has been applied as the sensing material. Finite element method ( FEM ) has been used to analyze the impact of the sensor geometry (membrane thickness, membrane and seismic mass radii) and PZT thick film placement on basic properties (sensitivity and bandwidth) of the device. The LTCC process was optimized in order to create thin and planar ceramic membrane with relatively huge seismic mass. Selected properties of the sensor have been measured and compared with the simulated ones.
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Research context
OpenAlex topics: Electrical and Thermal Properties of Materials · Ferroelectric and Piezoelectric Materials · Advanced Sensor Technologies Research
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Affiliations
Wrocław University of Technology Faculty of Microsystem Electronics and Photonics 50‐370 Wrocław Poland
Meggitt Sensing Systems Denmark 3490 Kvistgaard Denmark
References (18)
Show source-provided references
1. 10.1088/0960-1317/9/2/00510.1088/0960-1317/9/2/005 ↗
2. 10.1109/JMEMS.2003.81174910.1109/JMEMS.2003.811749 ↗
3. 10.1109/JSEN.2009.201441210.1109/JSEN.2009.2014412 ↗
4. 10.1088/0960-1317/10/3/30410.1088/0960-1317/10/3/304 ↗
5. 10.1016/j.measurement.2008.12.00210.1016/j.measurement.2008.12.002 ↗
6. H.Neubert U.Partsch D.Fleischer M.Gruchow A.Kamusella andT.Pham “Thick Film Accelerometers in LTCC‐Technology – Design Optimization Fabrication and Characterization ” Proceedings of the IMAPS/ACerS 4th International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies (CICMT 2008) Munich Germany April 21–24 (2008).10.4071/1551-4897-5.4.150 ↗
7. 10.1016/S0924-4247(00)00554-910.1016/S0924-4247(00)00554-9 ↗
8. Technology and Applications of Low Temperature Cofired Ceramic (LTCC) Based Sensors and Microsystems
9. Design Study of a Capacitive Pressure Sensor in Non‐Silicon Materials
10. 10.1007/s00542‐007‐0465‐310.1007/s00542‐007‐0465‐3 ↗
11. 10.1111/j.1744-7402.2006.02072.x10.1111/j.1744-7402.2006.02072.x ↗
12. 10.1111/j.1744-7402.2005.02039.x10.1111/j.1744-7402.2005.02039.x ↗
13. 10.1016/j.trac.2007.11.00210.1016/j.trac.2007.11.002 ↗
14. Zawada T. · Proceedings of the IMAPS/ACerS 5th International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies · 2009
15. Zawada T. · Proceedings of the XXXII International Conference of IMAPS ‐ CPMT IEEE · 2008
16. Setter N. · 2002
17. Halliday D. · 2009
18. 10.1016/j.sna.2005.12.00910.1016/j.sna.2005.12.009 ↗