journal article·2019-03

Study on the sintering behavior and characterization of the IGZO ceramics by slip casting

Yang Liu, Yongchun Shu, Xueyun Zeng, Benshuang Sun, Peng Liang, Yu Zhang, Chen Qiu, Jianhong Yi, Jilin He

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Abstract

Abstract High‐purity In 2 O 3 , Ga 2 O 3 and ZnO (In:Ga:Zn = 1:1:1) mixtures were employed to fabricate the IGZO (In‐Ga‐Zn‐O) ceramics by slip casting. The rheological properties and zeta potential of IGZO slurry were analyzed in details. The optimum amount of dispersant used in the IGZO slurry is studied in details. This study investigated the relationship between the phase composition of sintered IGZO ceramics and sintering temperatures. The IGZO ceramics with high density and low resistivity are successfully synthesized in an air atmosphere, and their grain size is distributed uniformly.
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Research context

OpenAlex topics: Thin-Film Transistor Technologies · ZnO doping and properties · Electrical and Thermal Properties of Materials

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Affiliations

TEDA Institute of Applied Physics Nankai University Tianjin China

Henan Province Industrial Technology Research Institute of Resources and Materials Zhengzhou University Zhengzhou China

Faculty of Materials Science and Engineering Kunming University of Science and Technology Kunming China

Funding

Zhengzhou University

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