The effect of substrate temperature on microstructural evolution and hardenability of tungsten carbide coating in hot filament chemical vapor deposition

Abstract Effect of substrate temperature on microstructural evolution and hardenability of tungsten carbide coating produced by hot filament chemical vapor deposition ( HFCVD ) process was studied. Annealed sheets of 316L stainless steels were used as the substrate. HFCVD technique, with substrate temperatures of 400 and 500°C, was used to deposit tungsten carbide coating on these sheets. Field Emission Scanning Electron Microscope ( FE ‐ SEM ) was used to study the evolution of microstructure. X‐Ray Diffraction spectroscopy was used to analyze the phases formed and Raman spectroscopy was employed to differentiate molecular composition of the coatings. The amount of the porosity of the coatings was measured and Vickers hardness measurement was used for hardness assessment. Results show that the tungsten carbide coatings have a honeycomb structure and increasing the temperature of the substrate increases the amount of porosity of the coating. XRD results showed that 3 different crystalline structures containing W, WC , and W ₂ C were formed in the coating deposited on the 316L stainless steel. Increasing the temperature of the deposition has increased the intensity of the peaks in the XRD results. Raman spectroscopy results indicated the presence of a carbon in the tungsten carbide coatings. Finally, microhardness of the tungsten carbide coating increases with increasing the temperature of the substrate.