journal article·1993-04

UV/ozone cleaning, a convenient alternative for high quality bonding preparation

J.A. Poulis, J.C. Cool, E.H.P. Logtenberg

Publisher page

Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

Source: Not provided · Quality: missing

Research context

OpenAlex topics: Mechanical Behavior of Composites · Material Properties and Processing · Electronic Packaging and Soldering Technologies

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (30)

Show source-provided references
1. Electric versus pneumatic power in hand prostheses for children10.3109/03091908909030211 ↗
2. Poulis, J.A. ‘Adhesive bonds on small cylindrical areas’ PhD Thesis (Technical University Delft, The Netherlands)
3. Anon · Machine Design · 1985 · 132
4. Anon · Machine Design · 1985 · 141
5. Polymer Interface and Adhesion
6. White · 1970 · 361
7. Anon, ‘Stripping photoresist with the PM 600 plasma system’ (March Instruments Inc, 125-J Mason Drive, Concord, CA, USA)
8. Plasma cleaning of metal surfaces10.1116/1.1318069 ↗
9. Buckles, S.L. ‘Use of argon plasma for cleaning hybrid circuits prior to bonding’ ISHM Proc (March Instruments Inc, CA, USA) pp 476–479
10. UV/ozone cleaning for organics removal on silicon wafers
11. Detection by Auger electron spectroscopy and removal by ozonization of photoresist residues
12. ISS/SIMS characterisation of UV/O3 cleaned surfaces10.1016/0378-5963(80)90053-7 ↗
13. Rice, R.G. and Netzer, A.N.‘Handbook of Ozone Technology and Applications’, Vol 2 (Butterworths, London) pp 1–85
14. Sources and Applications of Ultraviolet Radiation
15. Ozone
16. Vacuum Deposition of Thin Films
17. Vacuum Deposition of Thin Films
18. Vacuum Technology, Thin Films, and Sputtering
19. Vig · 1987 · Vol 1
20. Hideo Okabe‘Photochemistry of Small Molecules’ (John Wiley and Sons) pp 240–243
21. Gelijmde metalen constructies
22. Bangham, D.H. and Razouk, R.I. ‘Adsorption spectra and wettability of solid surfaces’ Trans Faraday Soc33 pp 1459–147210.1039/tf9373301459 ↗
23. The significance of the contact angle in relation to the solid surface10.1021/j150440a007 ↗
24. Über den einfluss der grenzflächenspannung auf die haftfestigkeit
25. Kinloch · 1987
26. Hodgman, C.D. (Ed) ‘Handbook of Chemistry and Physics’, 43rd edn (The Rubber Chemical Publishing Co, OH, USA) p 3133
27. Use of auger and X-ray photoelectron spectroscopy to study the locus of failure of structural adhesive joints10.1002/app.1977.070210907 ↗
28. Surface effects in adhesion, friction, wear, and lubrication
29. Rice · Handbook of Ozone Technology and Applications · 1982 · Vol 1 · 77
30. Wetting kinetics and the strength of adhesive joints10.1080/0021846708544578 ↗