3-D Electron Microscopy for Nano-Technology and the IC Industry
Source abstract
Abstract
C Kübel, D Hubert, WF Voorhout, MT Otten; 3-D Electron Microscopy for Nano-Technology and the IC Industry, Microscopy and Microanalysis, Volume 8, Issue S02, 1
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Advanced Electron Microscopy Techniques and Applications · Anodic Oxide Films and Nanostructures
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References
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