Preparation of multi‐tip arrays on flexible substrates for large‐scale microfabrication

Scanning probe microscopy (SPM) provides an important way for micro/nanofabrication. Compared with single‐tip mode, parallel multi‐tip mode enables an effective way for microfabrication with large scale and high efficiency by SPM. During the preparation of multi‐tip array, the height difference between different tips is quite difficult to be eliminated. In the present work multi‐tip arrays were prepared on different flexible rubber substrates with good bonding strength. Finite element analysis was carried out based on a hyperelastic constitutive model for selecting a suitable rubber substrate for producing the multi‐tip array, and the initial shear modulus C ₁₀ should be from 0.5 to 17. A series of comparative fabrication experiments were conducted by different multi‐tip arrays. The multi‐tip array with flexible substrates fulfilling the prediction model can compensate obviously the height difference resulting from microsphere size, and the flexible substrate with a lower C ₁₀ in this range is better for the scratching fabrication. Using the multi‐tip array, large‐scale surface patterning can be fabricated with low cost and easy operation. This work can promote the wide application of SPM and development of the surface texture engineering.