Temperature Measurement in Rapid Thermal Processing with Focus on the Application to Flash Lamp Annealing
Source abstract
Abstract
Abstract The present review intends to help its reader find a suitable method for temperature measurement in Millisecond Spike Annealing (MSA). For this purpose it is going to highlight current and former industrial and research approaches for both RTP (Rapid Thermal Processing) and MSA to measure the "true wafer temperature." The theoretical background of each measurement technique is considered along with its capability to be applied in MSA tools as well as its suitability for industry in terms of time and temperature resolution. Keywords: rapid thermal annealingmillisecond annealingflash lampblack body radiationtemperature measurementpyrometer
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Thin-Film Transistor Technologies · Integrated Circuits and Semiconductor Failure Analysis · Silicon and Solar Cell Technologies
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (48)
Show source-provided references
1. 10.1017/CBO9780511840173.01710.1017/CBO9780511840173.017 ↗
2. Maurer M. · 2004
3. 10.1143/JJAP.6.33910.1143/JJAP.6.339 ↗
4. Adams B. · 2001
5. Atzmon Z. · 1997 · 114
6. Hunter A. · 2003 · 85
7. See A. · 1997
8. Paranjpe A. P. · 1997
9. Stein A. · 1994 · 178
10. Stuart G. C. · 2002
11. Camm D. M. · 2006
12. Walk H. · 1994 · 194
13. Lojek B. · 1999
14. Ross J. · 2002
15. Timans P. J. · 1994 · 186
16. Tsai B. K. · 2004 · 167
17. Moslehi M. M. · 1993
18. Schietinger C. W. · US 5 318362 · 1994
19. Palfenier R. A. · 2004
20. Luxtron Corporation · 1997
21. Rupert R. E. · 1995
22. Schietinger C. · 1997 · 335
23. 10.1063/1.9270310.1063/1.92703 ↗
24. Timans P. J. · 1994
25. 10.1063/1.114213310.1063/1.1142133 ↗
26. Dawson R. · 2000
27. Maxwell J. D. · IEEE T-SEM · 2007 · 20 · 137
28. Qu Y. · 2006 · 285
29. Kreider K. G. · 2003 · 125
30. Jones M. R. · 2003 · 89
31. 10.1063/1.9362110.1063/1.93621 ↗
32. 10.1063/1.10259210.1063/1.102592 ↗
33. 10.1109/16.10821510.1109/16.108215 ↗
34. 10.1103/PhysRev.111.124510.1103/PhysRev.111.1245 ↗
35. 10.1117/12.14209210.1117/12.142092 ↗
36. 10.1063/1.9388010.1063/1.93880 ↗
37. 10.1149/1.222163310.1149/1.2221633 ↗
38. 10.1063/1.34851710.1063/1.348517 ↗
39. 10.1063/1.114492910.1063/1.1144929 ↗
40. 10.1109/ULTSYM.1993.33946510.1109/ULTSYM.1993.339465 ↗
41. Lee c.Y. J. · IEDM · 1993 · 1 · 188
42. 10.1109/66.48429110.1109/66.484291 ↗
43. 10.1143/JJAP.47.246010.1143/JJAP.47.2460 ↗
44. 10.1143/JJAP.20.L86710.1143/JJAP.20.L867 ↗
45. 10.1103/PhysRevLett.47.35610.1103/PhysRevLett.47.356 ↗
46. 10.1103/PhysRevLett.44.160410.1103/PhysRevLett.44.1604 ↗
47. Nambu Y. · US 6475815 · 2002
48. 10.1063/1.33691010.1063/1.336910 ↗