Quantitative secondary ion mass spectrometry analysis of oxygen isotopes and other light elements in silicon oxide films
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Abstract
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Research context
OpenAlex topics: Ion-surface interactions and analysis · Electron and X-Ray Spectroscopy Techniques · Nuclear Physics and Applications
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References (20)
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1. Morabito · Surface Sci. · 1972 · 33 · 42210.1016/0039-6028(72)90220-8 ↗
2. Tsai · 1973 · 87
3. Hofker · 1973 · 133
4. Croset · J. radioanal. Chem. · 1972 · 12 · 6910.1007/BF02520976 ↗
5. Blanchard · J. radioanal. Chem. · 1972 · 12 · 8510.1007/BF02520978 ↗
6. Lewis · Appl. Phys. Lett. · 1973 · 23 · 26010.1063/1.1654881 ↗
7. Kim · 1972
8. Kim · 1975 · 24 · 307
9. Tsai · 1975 · 115
10. Slodzian · Surface Sci. · 1975 · 48 · 16110.1016/0039-6028(75)90315-5 ↗
11. Croset · J. electrochem. Soc. · 1971 · 118 · 71710.1149/1.2408153 ↗
12. Croset · J. electrochem. Soc. · 1973 · 120 · 52610.1149/1.2403494 ↗
13. CAMECA report No. 6861.
14. Blanchard · Mat. Res. Bull. · 1971 · 6 · 128310.1016/0025-5408(71)90127-9 ↗
15. Physics and Technology of Semiconductors Devices
16. Amsel · Nucl. Instr. Methods · 1971 · 92 · 48110.1016/0029-554X(71)90100-5 ↗
17. M. Croset, D. Dieumegard and S. Rigo, To be published.
18. Croset · 1975
19. Amsel · 1975 · Vol 75-1 · 277
20. Dignam · 1972 · 1 · 193