journal article·2025-10Open access

The role of boron in interactions between liquid Si,B alloy and SiC at high temperature: Contribution of Raman spectroscopy, electron energy loss spectroscopy (EELS) and atom probe tomography (APT)

Georges Chollon, Hervé Plaisantin, Jérôme Roger, Julien Danet, David Lopez-Ferber, Emmanuel Cadel

Corrosion Science· Volume 255

Abstract

This study examines the protective role of boron towards chemical vapor deposited (CVD) SiC via the synthesisand analysis, at various scales, of model composites representative of SiC/SiC composites prepared by siliconmelt infiltration. Comparing the SiC-Si,B and SiC-Si model composites clearly demonstrates the boron’s protectiveeffect. Yet, the SiC-Si,B sample shows a macroscopic reactivity gradient related to the progression of theSi,B alloy through the porous SiC network. Electron energy loss spectroscopy (EELS) and atom probe tomography(APT) were used to assess elemental composition at the quasi-atomic and trace scales, in the different phases andat SiC/Si,B interfaces. Boron diffuses into bulk SiC, in agreement with thermodynamic calculations, but alsoconcentrates at structural defects in polycrystalline CVD SiC. EELS and APT both revealed a high boron overconcentrationover a few nanometers at SiC/Si,B interfaces, without intermediate layer visible by TEM. Ramanspectroscopy also evidenced a microscale gradient of substituted boron in the Si,B alloy, near SiC/Si,B interfaces,which was related to a high carbon concentration and an unexpected carbon environment. These results led toconclude that the addition of boron cumulates three beneficial effects limiting SiC reactivity: (1) a volume effectin SiC, stabilizing and accommodating structural defects (2) an interfacial effect, with B atoms concentrating andstabilizing SiC/Si,B interfaces, and (3) a volume effect in the Si,B alloy, forming B-C clusters inhibiting carbondiffusion. Further RMS, EELS and APT analyses at different locations in the model composites would be useful toexplain the macroscopic corrosion gradient.
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Research context

OpenAlex topics: Advanced Materials Characterization Techniques · Microstructure and mechanical properties · Aluminum Alloy Microstructure Properties

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References (100+)

Show source-provided references
1. Research progress of continuous fiber reinforced ceramic matrix composite in hot section components of aero engine10.1088/1757-899X/678/1/012043 ↗
2. 5.13 Development history of GE’s prepreg melt infiltrated ceramic matrix composite material and applications
3. Microstructural and mechanical characteristics of SiC/SiC composites with modified-RS process10.1016/S0022-3115(00)00679-6 ↗
4. SiC/SiC composites for 1200 °C and above
5. How to tame the aggressiveness of liquid silicon in the LSI process10.4028/www.scientific.net/KEM.742.238 ↗
6. Development of damage-tolerant ceramic matrix composites (SiC/SiC) using Si-BN/SiC/pyC fiber coatings and LSI processing
7. Effect of structure of interfacial coating layer on mechanical properties of continuous fiber reinforced reaction sintered silicon carbide matrix composite10.1023/A:1014346901308 ↗
8. Residual stress determination of silicon containing boron dopants in ceramic matrix composites
9. Corman, S. Gregory, Luthra, L. Krishan, Melt Infiltrated Ceramic Composites (Hipercomp) for Gas Turbine Engine Applications, 2005. 〈https://doi.org/10.2172/936318〉.10.2172/936318 ↗
10. Microstructure and densification of sintered (B + C)-doped β-silicon carbide10.1557/PROC-327-269 ↗
11. Detection of boron segregation to grain boundaries in silicon carbide by spatially resolved electron energy-loss spectroscopy10.1111/j.1551-2916.1999.tb20089.x ↗
12. Structural and chemical widths of general grain boundaries: modification of local structure and bonding by boron-doping in β-silicon carbide10.1023/A:1008720404554 ↗
13. Determination of the chemical width of grain boundaries of boron- and carbon-doped hot-pressed β-SiC by HAADF imaging and ELNES line-profile10.1016/S1359-6454(99)00393-6 ↗
14. Extending the analysis of EELS spectrum-imaging data, from elemental to bond mapping in complex nanostructures10.1016/j.ultramic.2008.07.005 ↗
15. Analysis of the electronic and chemical structure in boron and phosphorus passivated 4H -SiC/SiO2 interfaces using HRTEM and STEM-EELS10.1063/1.5053595 ↗
16. Mapping boron in silicon solar cells using electron energy-loss spectroscopy
17. Electron energy-loss spectroscopy of boron-doped layers in amorphous thin film silicon solar cells10.1063/1.4793587 ↗
18. Boron-doping of cubic SiC for intermediate band solar cells: a scanning transmission electron microscopy study10.21468/SciPostPhys.5.3.021 ↗
19. Structure of newly synthesized BC3 films10.1063/1.105053 ↗
20. Evidence for the solubility of boron in graphite by electron energy loss spectroscopy10.1016/S0008-6223(99)00128-1 ↗
21. Metal gettering by boron-silicide precipitates in boron-implanted silicon10.1016/S0168-583X(96)00942-1 ↗
22. Local boron environment in B-doped nanocrystalline diamond films10.1039/c2nr31530k ↗
23. Microstructural characterization of boron-rich boron carbide10.1016/j.actamat.2017.06.063 ↗
24. Atom probe tomography10.1063/1.2709758 ↗
25. Review of atom probe FIB-based specimen preparation methods10.1017/S1431927607070845 ↗
26. Miller · 2014
27. 2016
28. Atom probe tomography10.1038/s43586-021-00047-w ↗
29. Atom probe tomography quantification of carbon in silicon10.1016/j.ultramic.2020.113153 ↗
30. Effect of carbon on boron diffusion and clustering in silicon: temperature dependence study10.1063/1.5048313 ↗
31. Quantitativeness in laser-assisted atom probe analysis of boron and carbon codoped in silicon10.7567/JJAP.56.116601 ↗
32. Impact of carbon coimplantation on boron behavior in silicon: carbon–boron coclustering and suppression of boron diffusion10.1063/1.3597303 ↗
33. Impact of carbon co-implantation on boron distribution and activation in silicon studied by atom probe tomography and spreading resistance measurements10.7567/JJAP.55.026501 ↗
34. Atom-probe tomography study of boron precipitation in highly implanted silicon10.1002/pssa.201300127 ↗
35. Extended defects and precipitation in heavily B-doped silicon10.1016/j.tsf.2013.01.090 ↗
36. Atomic scale evidence of the suppression of boron clustering in implanted silicon by carbon coimplantation10.1063/1.3533416 ↗
37. Atomic-scale study of the role of carbon on boron clustering10.1016/j.tsf.2009.08.022 ↗
38. Direct imaging of boron segregation to extended defects in silicon10.1063/1.3526376 ↗
39. Clustering and nearest neighbour distances in atom-probe tomography10.1016/j.ultramic.2009.06.007 ↗
40. Nucleation of boron clusters in implanted silicon10.1063/1.3265998 ↗
41. Three-dimensional atomic-scale imaging of boron clusters in implanted silicon10.1016/j.scriptamat.2008.10.008 ↗
42. Three-dimensional atom mapping of boron in implanted silicon10.1016/j.ultramic.2008.09.008 ↗
43. Atomic scale study of boron interstitial clusters in ion-implanted silicon10.1063/1.3126498 ↗
44. Characterization of ultralow-energy implants and towards the analysis of three-dimensional dopant distributions using three-dimensional atom-probe tomography10.1116/1.2141621 ↗
45. Pulsed laser atom probe characterization of silicon carbide10.1051/jphyscol:1989878 ↗
46. P.R. Heck, M.J. Pellin, A.M. Davis, I. Martin, L. Renaud, L. Benbalagh, D. Isheim, N.D. Seidman, J. Hiller, T. Stephan, et al., Atom-probe tomographic analyses of presolar silicon carbide grains and meteoritic nanodiamonds---first results on silicon carbide, in: Proceedings of the 41st Lunar and Planetary Science Conference, 2010. 〈https://presolar.physics.wustl.edu/Laboratory_for_Space_Sciences/Abstract_2010_files/Heck-LPSC-10.pdf〉.
47. Quantitative atom probe analysis of carbides10.1016/j.ultramic.2010.12.024 ↗
48. Surface dynamics of field evaporation in silicon carbide10.1021/acs.jpcc.2c08908 ↗
49. Thermo-Calc & DICTRA, computational tools for materials science10.1016/S0364-5916(02)00037-8 ↗
50. N. Saunders, A.P. Miodownik, Calculation of Phase Diagrams (CALPHAD): A Comprehensive Guide, N. Saunders and A. P. Miodownik, Elsevier, 1998.
51. Lukas · 2007
52. Thermodynamic assessment of the B–C–Si system10.1016/j.jallcom.2009.03.044 ↗
53. The TC-Python API Programmer Guide, n.d. 〈https://thermocalc.com/support/documentation/〉.
54. On understanding the microstructure of SiC/SiC ceramic matrix composites (CMCs) after a material removal process10.1016/j.msea.2018.11.037 ↗
55. Singh R.N., Gaddipati A.R., Composite containing coated fibrous material, 4889686, n.d.
56. The microstructure of SCS-6 SiC fiber10.1557/JMR.1991.2234 ↗
57. Matrix characterization of fibre-reinforced SiC matrix composites fabricated by chemical vapour infiltration10.1007/BF00361507 ↗
58. Characterization of SiC ceramics with complex porosity by capillary infiltration: Part A – filling by hexadecane at 20 °C10.1016/j.jeurceramsoc.2019.12.049 ↗
59. Optical absorption in heavily doped silicon10.1103/PhysRevB.23.5531 ↗
60. Confocal micro-Raman scattering and Rutherford backscattering characterization of lattice damage in aluminum implanted 6H–SiC10.1016/S0925-9635(98)00275-1 ↗
61. Spectral dependence of optical absorption of 4 H -SiC doped with boron and aluminum10.1155/2018/8705658 ↗
62. Temperature dependence of raman scattering in silicon10.1103/PhysRevB.1.638 ↗
63. Das system bor-silicium
64. Mysterious SiB3: identifying the relation between α- and β-SiB310.1021/acsomega.9b02727 ↗
65. The corrosion behavior of various CVD SiC coatings in molten silicon10.1016/j.ceramint.2023.11.147 ↗
66. Residual stress measurements in melt infiltrated SiC/SiC ceramic matrix composites using Raman spectroscopy10.1016/j.jeurceramsoc.2018.02.013 ↗
67. Interaction between electronic and vibronic Raman scattering in heavily doped silicon10.1016/0038-1098(73)90602-9 ↗
68. Effect of free carriers on zone-center vibrational modes in heavily doped p-type Si. II. Optical modes10.1103/PhysRevB.8.4734 ↗
69. Raman study of the interaction between localized vibrations and electronic excitations in boron-doped silicon10.1103/PhysRevB.9.4344 ↗
70. Study of the localized vibrations of boron in heavily doped Si10.1103/PhysRevB.22.4825 ↗
71. Raman spectroscopy of heavily doped polycrystalline silicon thin films10.1103/PhysRevB.61.15558 ↗
72. Raman study of Fano interference in p-type doped silicon10.1002/jrs.2614 ↗
73. Raman scattering from localized vibrational modes of boron impurities in silicon10.1016/0038-1098(71)90302-4 ↗
74. Phonon dispersion curves by Raman scattering in SiC, polytypes 3C, 4H, 6H, 15R, and 21R10.1103/PhysRev.173.787 ↗
75. Characterization of the free-carrier concentrations in doped β-SiC crystals by Raman scattering10.1063/1.338830 ↗
76. Raman scattering from anisotropic LO-phonon–plasmon–coupled mode in n -type 4H– and 6H–SiC10.1063/1.360174 ↗
77. Spatial characterization of doped SiC wafers by Raman spectroscopy10.1063/1.368947 ↗
78. Raman Characterization of doped 3C-SiC/Si for different silicon substrates and C/Si ratios10.4028/www.scientific.net/MSF.645-648.255 ↗
79. Carrier density evaluation in P-type SiC by Raman scattering10.4028/www.scientific.net/MSF.338-342.607 ↗
80. Heavily p-type doping of bulk 6H-SiC and 3C-SiC grown from Al-Si melts10.4028/www.scientific.net/MSF.645-648.59 ↗
81. Growing 3C-SiC heteroepitaxial layers on α-SiC substrate by vapour–liquid–solid mechanism from the Al–Ge–Si ternary system10.1016/j.jcrysgro.2010.10.174 ↗
82. p-doped SiC growth on diamond substrate by VLS transport10.4028/www.scientific.net/MSF.740-742.331 ↗
83. Micro-Raman investigation of cubic silicon carbide crystals grown from the travelling zone method10.1002/pssa.200674134 ↗
84. Prospects of the use of liquid phase techniques for the growth of bulk silicon carbide crystals10.1016/S0921-5107(98)00440-1 ↗
85. Association of broad icosahedral Raman bands with substitutional disorder in SiB3 and boron carbide10.1103/PhysRevB.57.2675 ↗
86. Structure, microstructure and disorder in low temperature chemical vapor deposited SiC coatings10.1016/j.jeurceramsoc.2023.02.067 ↗
87. R. Hull, INSPEC (Information service), INSPEC (Information service) (eds.), Properties of Crystalline Silicon, INSPEC, the Institution of Electrical Engineers, London, 1999.
88. G.L. Harris (ed.), Properties of Silicon Carbide, IEE, INSPEC, London, U.K, 1995.
89. Pichler · 2004
90. Boron carbide—a comprehensive review10.1016/0955-2219(90)90048-K ↗
91. The coexistence of silicon borides with boron-saturated silicon: metastability of SiB310.1557/JMR.1998.0252 ↗
92. X-ray photoelectron spectroscopy analysis of boron defects in silicon crystal: a first-principles study10.1063/1.4948572 ↗
93. SiL core edge fine structure in an oxidation series of silicon compounds: a comparison of microelectron energy loss spectra with theory10.1063/1.335768 ↗
94. Current trends for EELS studies in physics10.1051/mmm:0199100202-3039500 ↗
95. Diffusion of boron in silicon carbide10.1016/S0921-4526(01)00889-4 ↗
96. Selective doping in silicon carbide power devices10.3390/ma14143923 ↗
97. Boron-related defects in N-type 4H-SiC schottky barrier diodes10.3390/ma16093347 ↗
98. First-principles calculations of p -type impurities in cubic SiC10.1103/PhysRevB.53.4458 ↗
99. Ab initio study of nitrogen and boron substitutional impurities in single-wall SiC nanotubes10.1103/PhysRevB.73.245415 ↗
100. First principles analysis of impurities in silicon carbide grain boundaries10.1016/j.actamat.2021.117421 ↗