journal article·2018-02

Air and chlorine gas corrosion of different silicon carbides analyzed by nano-Fourier-transform infrared (nano-FTIR) spectroscopy

Christian Vogel, Peter Hermann, Bernd Kästner, Burkart Adamczyk, Arne Hoehl, Gerhard Ulm, Christian Adam

Corrosion Science· Volume 131
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Abstract

Abstract The present study shows the potential of high-resolution imaging and nano-Fourier-transform infrared (nano-FTIR) spectroscopy for corrosion science. The protective oxidation layers of different chlorine-gas treated silicon carbides (SiCs) were characterized with these techniques. A nitrified SiC showed the highest resistant strength against chlorine corrosion at 1000 °C compared to the other SiCs. Nano-FTIR spectroscopy with a lateral resolution below 40 nm detected differences in the crystallinity of the bulk-SiC and in the transitional region to the protective layer. Furthermore, high-resolution imaging provides deep insight in the interfacial layer between bulk-SiC and the protective oxidation layer on sub-micrometer scale.
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Research context

OpenAlex topics: Advanced ceramic materials synthesis · Semiconductor materials and devices · Silicon Carbide Semiconductor Technologies

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