A comparison of the oxidation of sodium-implanted CVD Si3N4 with the oxidation of sodium-implanted SiC-crystals

journal article·1992-04

Z. Zheng, R.E. Tressler, K.E. Spear

Corrosion Science· Volume 33· Issue 4

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OpenAlex topics: Semiconductor materials and devices · Advanced ceramic materials synthesis · Silicon Carbide Semiconductor Technologies

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1. Molten-salt corrosion of silicon nitride: I, sodium carbonate10.1111/j.1151-2916.1988.tb05828.x ↗

2. Molten-salt corrosion of silicon nitride: II, sodium sulfate10.1111/j.1151-2916.1988.tb05829.x ↗

3. Molten salt corrosion of SiC and Si2N4 ceramics10.1111/j.1151-2916.1976.tb10962.x ↗

4. Molten salt degradation of Si3N4 ceramics

5. Sodium-assisted oxidation of reaction bonded silicon nitride10.1007/BF00544739 ↗

6. Oxidation and hot corrosion of hot-pressed Si3N4 at 1000°C

7. The effect of sodium contamination on oxidation of single crystal silicon carbide10.1016/0010-938X(92)90203-F ↗

8. Ziegler · 1985

9. A Fortran program for analysis of ellipsometric measurements

10. Oxidation studies of crystalline CVD silicon nitrode10.1149/1.2096955 ↗

11. Strengthening of polyphase silicon nitride materials10.1007/BF01111970 ↗

12. Isotope studies of the oxidation of Si3N4 and Si using SIMS10.1149/1.2086543 ↗

13. Oxidation of silicon carbide single crystals and CVD silicon nitride