Lateral resolution in scanning Kelvin probe microscopy
Source abstract
Abstract
Abstract The lateral resolution of a scanning Kelvin probe (SKP) is a key parameter for investigating microstructures. It depends on two main device parameters, the tip diameter and the tip sample distance. Variation of them affects physical parameters like stray capacitance and signal intensity. A model sample with a sharp border between two materials of different work function (Al/Cu) has been produced. Line-scans perpendicular to the Al–Cu edge show the influence of tip diameters and tip-sample gaps. A mathematical expression for the maximum lateral resolution was derived by the method of images. These calculations are in good agreement with systematic measurements.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Force Microscopy Techniques and Applications · Near-Field Optical Microscopy · Surface and Thin Film Phenomena
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (33)
Show source-provided references
1. A novel detection system for defects and chemical contamination in semiconductors based upon the scanning Kelvin probe10.1016/S0039-6028(99)00025-4 ↗
2. Kelvin probe investigations of metal work functions and correlation to device performance of organic light-emitting devices10.1016/S0379-6779(99)00450-6 ↗
3. Surface potential imaging of PV cells with a Kelvin probe10.1016/j.solmat.2012.03.006 ↗
4. Application of Volta potential mapping to determine metal surface defects10.1016/j.electacta.2007.05.077 ↗
5. Scanning Kelvin probe investigations on the delamination of polymeric coatings from metallic surfaces10.1016/S0300-9440(00)00095-3 ↗
6. Interpretation of scanning Kelvin probe potential maps for coated steel using semi-quantitative current density maps10.1016/j.corsci.2008.07.023 ↗
7. Correlations between the volta potential and filiform corrosion on painted AA2024 aluminum alloy10.1002/sia.3141 ↗
8. Potential control under thin aqueous layers using a Kelvin probe10.1016/j.corsci.2006.10.017 ↗
9. On the atmospheric corrosion of metals which are covered with thin electrolyte layers—I. Verification of the experimental technique10.1016/0010-938X(90)90032-Z ↗
10. On the atmospheric corrosion of metals which are covered with thin electrolyte layers—II. Experimental results10.1016/0010-938X(90)90033-2 ↗
11. On the atmospheric corrosion of metals which are covered with thin electrolyte layers-iii. The measurement of polarisation curves on metal surfaces which are covered by thin electrolyte layers10.1016/0010-938X(90)90034-3 ↗
12. Corrosion of press-hardened galvanized steel10.1016/j.corsci.2012.04.048 ↗
13. Contact electricity of metals10.1080/14786449808621172 ↗
14. A new method of measuring contact potential differences in metals10.1063/1.1748947 ↗
15. Measurement of localized surface potential differences10.1088/0022-3735/2/11/303 ↗
16. Piezoelectric driven Kelvin probe for contact potential difference studies10.1063/1.1134750 ↗
17. The investigation of the corrosion properties of metals, covered with adsorbed electrolyte layers—a new experimental technique10.1016/0010-938X(87)90043-6 ↗
18. Low cost PC based scanning Kelvin probe10.1063/1.1149197 ↗
19. A new method for the distance control of a scanning Kelvin microscope10.1088/0957-0233/3/2/017 ↗
20. An acoustically driven Kelvin probe for work-function measurements in gas ambient10.1063/1.1146448 ↗
21. A micromachined Kelvin probe with integrated actuator for microfluidic and solid-state applications10.1109/JMEMS.2005.845453 ↗
22. Kelvin probe force microscopy for potential distribution measurement of semiconductor devices10.1063/1.358758 ↗
23. High-resolution Kelvin probe microscopy in corrosion science: scanning Kelvin probe force microscopy (SKPFM) versus classical scanning Kelvin probe (SKP)10.1016/j.electacta.2007.03.016 ↗
24. Probe diameter and probe–specimen distance dependence in the lateral resolution of a scanning Kelvin probe10.1063/1.1430546 ↗
25. 2004
26. Theoretical simulation and preparation of binary and ternary combinatorial libraries by thermal PVD10.1002/pssa.200983302 ↗
27. Dependence of electron work function of Al–Mg alloys on surface structures and relative humidity10.1016/j.physb.2011.08.017 ↗
28. Local potential measurements with the SKPFM on aluminium alloys10.1016/j.electacta.2004.01.045 ↗
29. Electronic effects on the surface potential at the vapor-liquid interface of water10.1021/ja802851w ↗
30. Multitip scanning bio-Kelvin probe10.1063/1.1149678 ↗
31. The Kelvin probe method for work function topographies: technical problems and solutions10.1016/0042-207X(84)90208-2 ↗
32. Analysis of stray capacitance in the Kelvin method10.1063/1.1142075 ↗
33. Electrodynamics of continuous media