journal article·2002-02-05

A New Scanning Probe Lithography Scheme with a Novel Metal Resist

M. Rolandi, C.F. Quate, H. Dai

Advanced Materials· Volume 14· Issue 3
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Abstract

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Research context

OpenAlex topics: Advancements in Photolithography Techniques · Photonic and Optical Devices · Force Microscopy Techniques and Applications

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