Nanopore engineered tortuosity towards thermo-mechanically enhanced low-k polymer-mesoporous organosilica composite membranes
Source abstract
Abstract
Abstract The continuous development of microelectronics requires mechanically enhanced insulating materials with a lower dielectric (low-k) constant. To accomplish this, in this paper, low-k polymer nanocomposites were reinforced with hydrophobic ethane-bridged mesoporous organosilica (EMO) particles as fillers. In this study, three types of EMOs such as pure EMO, EMO functionalized with trimethoxyphenylsilane (PTS) (EMO-PTS) group, and EMO functionalized with 1-[3-(trimethoxysilyl)propyl]urea (UTS) (EMO-UTS) group were prepared via sol-gel self-assembly method. Mesostructures and surface areas of synthesized EMO particles were successfully characterized by XRD, TEM, and BET, whereas 13C and 29Si CP/MAS NMR spectra were also evidenced the presence of organic functional groups in the final EMO particles. Then, these filler materials were employed along with PMDA-ODA PAA (polyamic acid) solution for making efficient polyimide (PI) polymer composites. The good dispersion of EMO/EMO-PTS/EMO-UTS fillers into polyimide (PI) matrix were investigated using cross-section of scanning electron microscopy (SEM), transmission electron microscopy (TEM), and atom force microscopy (AFM). UV–visible spectroscopy has also shown optical transmittance more than 80% in the visible range. Dielectric constant (DC) was also found to be reduced from 3.42 (in PI) to 2.51 (in polymer composites) upon addition of 2–3 wt% of filler materials. The addition of these fillers into polymer PI has also significantly enhanced modulus, hardness and glass-transition temperature of the final composites. These results strongly suggest that EMO and functionalized EMO with either PTS or UTS could be used as promising “reinforcing mesoporous filler and low-k materials” with polyimide.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Synthesis and properties of polymers · Copper Interconnects and Reliability · Silicone and Siloxane Chemistry
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (45)
Show source-provided references
1. Low dielectric constant polymers for microelectronics10.1016/S0079-6700(00)00043-5 ↗
2. Supramolecular approaches to nanoscale dielectric foams for advanced microelectronic Devices10.1557/mrs2000.30 ↗
3. Ultra-low-k polyimide hybrid films via copolymerization of polyimide and polyoxometalates10.1039/b618910e ↗
4. Synthesis, morphology, and properties of hydroxyl terminated-POSS/polyimide low-k nanocomposite films10.1002/pola.22906 ↗
5. Microstructure and properties of 3,3/,4,4/-biphenyltetracarboxylic dianhydride (BPDA)-p-phenylene diamine (PDA) polyimide/poly(vinylsilsesquioxane) hybrid nanocomposite films10.1002/pola.20312 ↗
6. Low dielectric property of novel mesoporous silica/polymer composites using smart molecular caps: theoretical calculation of air space encapsulated inside mesopores10.1016/j.micromeso.2010.09.020 ↗
7. Low dielectric polyimide/poly(silsesquioxane)-like nanocomposite material10.1016/S0032-3861(00)00805-3 ↗
8. Microstructure and properties of polyimide/poly(vinylsilsesquioxane) hybrid composite films10.1016/S0032-3861(03)00429-4 ↗
9. Controllable low dielectric porous polyimide films templated by silica microspheres: microstructure, formation mechanism, and properties10.1016/j.jcis.2012.08.036 ↗
10. Hybrid silica-polyimide composite membranes: gas transport properties10.1016/S0032-3861(01)00803-5 ↗
11. Formation of interconnected globular structure of silica phase in polyimide-silica hybrid films prepared by the sol-gel process10.1021/cm00043a009 ↗
12. Synthesis and characterization of polyimide/silica hybrid composites10.1021/cm980428l ↗
13. Covalently linked, transparent silica–poly (imide) hybrids10.1002/(SICI)1099-1581(199705)8:5<289::AID-PAT648>3.0.CO;2-3 ↗
14. Mechanical and thermal properties of polyimide/silica hybrids with imide‐modified silica network structures10.1002/app.27149 ↗
15. Effect of reactive channel functional groups and nanoporosity of nanoscale mesoporous silica on properties of polyimide composite10.1021/ma060990u ↗
16. Novel low-κ polyimide/mesoporous silica composite films: preparation, microstructure, and properties10.1016/j.polymer.2006.10.037 ↗
17. Structure and infrared emissivity of polyimide/mesoporous silica composite films10.1016/j.jssc.2004.12.010 ↗
18. Mesoporous silica/polymer composites utilizing intelligent caps onto mesopore walls toward practical low‐dielectric materials10.1002/asia.200900267 ↗
19. Functionalized mesoporous silica/polyimide nanocomposite thin films with improved mechanical properties and low dielectric constant10.1016/j.compscitech.2007.09.021 ↗
20. Evaporation-induced self-Assembly of hybrid bridged silsesquioxane film and particulate mesophases with integral organic functionality10.1021/ja9935862 ↗
21. Materials chemistry for low-k materials10.1016/S1369-7021(06)71387-6 ↗
22. A new procedure to seal the pores of mesoporous low-k films with precondensed organosilica oligomers10.1039/c2cc18017k ↗
23. High-performance ultralow dielectric constant carbon-bridged mesoporous organosilica films for advanced interconnects10.1039/C4TC00901K ↗
24. Periodic mesoporous organosilica materials incorporating various organic functional groups: synthesis, structural characterization, and morphology10.1021/cm0480059 ↗
25. Ruthenium-functionalised hybrid periodic mesoporous organosilicas: synthesis and structural characterization10.1039/b412637h ↗
26. The determination of pore volume and area distributions in porous substances. I. Computations from nitrogen isotherms10.1021/ja01269a023 ↗
27. The determination of pore volume and area distributions in porous substances. II. Computations from nitrogen isotherms10.1021/ja01145a126 ↗
28. Novel bifunctional periodic mesoporous organosilicas, BPMOs: synthesis, characterization, properties and in-situ selective hydroboration-alcoholysis reactions of functional groups10.1021/ja0037320 ↗
29. Sulfuric acid-functionalized mesoporous benzene− silica with a molecular-scale periodicity in the walls10.1021/ja026799r ↗
30. Evaporation-induced self-assembly of mesoscopically ordered organic/organosilica nanocomposite thin films with photoluminescent properties and improved hardness10.1021/cm702753b ↗
31. Framework functionalization of periodic mesoporous organosilica with 1,2-bis[3-(triethoxysilylpropyl)ureido] cyclohexane function via basic co-condensation self-assembly10.1166/jnn.2008.110 ↗
32. Structuring of bridged silsesquioxanesvia cooperative weak interactions: H-bonding of urea groups and hydrophobic interactions of long alkylene chains10.1039/b504635a ↗
33. Morphology of a poly(imide siloxane) segmented copolymer/silica hybrid composite10.1002/1521-3927(20020601)23:9<544::AID-MARC544>3.0.CO;2-S ↗
34. A Study on the interfacial compatibility, microstructure and physico-chemical properties of polyimide/organically modified silica nanocomposite membrane10.3390/polym13081328 ↗
35. Atomic force microscopy study of organic-inorganic hybrid materials10.1021/cm970703o ↗
36. Mussel-inspired modification of boron nitride for natural rubber composites with high thermal conductivity and low dielectric constant10.1016/j.compscitech.2019.04.016 ↗
37. Fluorinated polyimide with polyhedral oligomeric silsesquioxane aggregates: toward low dielectric constant and high toughness10.1016/j.compscitech.2019.107700 ↗
38. Compatibility of soluble polyimide/silica hybrids induced by a coupling agent10.1021/cm010088v ↗
39. Facile in-situ template synthesis of sulfonated polyimide/mesoporous silica hybrid proton exchange membrane for direct methanol fuel cells10.1016/j.micromeso.2011.07.010 ↗
40. Effect of Interfacial interaction on the tensile yield stress of polymer composites in interfaces in polymer
41. Influence of siloxane composition and morphology on properties of polyimide-silica hybrids10.1016/0032-3861(95)93766-F ↗
42. Compatibility of polyimide-silicate ceramers induced by alkoxysilane silane coupling agents10.1016/0022-3093(94)90009-4 ↗
43. Effects of interface interaction and microphase dispersion on the mechanical properties of PCL/PLA/MMT nanocomposites visualized by nanomechanical mapping10.1016/j.compscitech.2020.108048 ↗
44. Interfacial interactions in silica-reinforced polypropylene nanocomposites and their impact on the mechanical properties10.1002/pc.23380 ↗
45. Design of interpenetrated networks of mesostructured hybrid silica and nonconductive poly(vinylidene fluoride)–cohexafluoropropylene (PVdF–HFP) polymer for proton exchange membrane fuel cell applications10.1002/asia.201000784 ↗