Highly Controllable Etching of Epitaxial GaAs Layers by the Pulse Etching Method
Source abstract
Abstract
Abstract not Available.
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Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Semiconductor Quantum Structures and Devices · Radio Frequency Integrated Circuit Design · Semiconductor Lasers and Optical Devices
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Affiliations
Institut für Hochfrequenztechnik, TH Darmstadt, Merckstrasse 25, 6100 Darmstadt, Germany
References
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