Lateral Solid‐Phase Epitaxial Growth of Phosphorus‐Ion Implanted CVD Polysilicon
Source abstract
Abstract
Abstract not Available.
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Semiconductor materials and devices · Silicon and Solar Cell Technologies · Advancements in Semiconductor Devices and Circuit Design
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Hitachi Limited, Central Research Laboratory, Kokubunji, Tokyo 185, Japan
References
Reference metadata was not supplied for this record.