Structural Analysis of Silicon‐Implanted Polymethyl Methacrylate Films on Glass

Electron diffraction and microscopic analyses of silicon‐implanted polymethyl methacrylate (PMMA) films deposited on glass substrates have been carried out with the aid of differential etching. Results show the films to consist of amorphous and polycrystalline graphite structures incorporating diamond‐like structure in the bulk of the film and silicon carbide crystallites near the film‐glass interface. Particle size is typically less than 50 nm with some crystallites as large as 0.5 μm.