Preparation of multilayer piezoelectric device by aerosol deposition using a novel detachment method

A three-layer stacked piezoelectric device with a thickness of 300 μm (100 μm per layer) was successfully prepared by aerosol deposition (AD) using a novel detachment method. Prior to preparing stacked Pb(Zr,Ti)O3 (PZT), a gas generation layer (GGL) with specific carbon content and a dummy metal layer (DML) were sequentially prepared on a stainless-steel substrate. PZT layers and internal electrode layers were then alternately stacked by AD and sputtering, respectively. After that, the layer system was subjected to detachment annealing, where CO2 gas was generated from the GGL and diffused along the interface between the GGL and DML, allowing stacked PZT to be detached from the substrate easily and reliably. The obtained three-layer stacked PZT exhibited an almost equivalent piezoelectric property as compared to a conventionally processed piezoelectric device.