Structure, Mechanical Properties and Water Vapor Corrosion Resistance of AlCrNbSiTiN High-Entropy Nitride Coatings Deposited by RF Magnetron Sputtering
Source abstract
Abstract
High-entropy nitride AlCrNbSiTiN coatings were deposited by RF magnetron sputtering at different bias voltages. The structure, mechanical properties and water vapor corrosion resistance of the coatings were systematically studied. The coatings exhibit a face-centered cubic (FCC) structure, while achieving a hardness up to 35.8 GPa. The main wear mechanisms of the coatings are adhesive wear and oxidation wear. After 200 h of water vapor corrosion, the content of O in the coatings is 4.30 at.%.
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Research context
OpenAlex topics: Metal and Thin Film Mechanics · High Entropy Alloys Studies · Diamond and Carbon-based Materials Research
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
CNOOC Safety &Technology Service Co., Ltd., Tianjin 300450, China
School of Power & Mechanical Engineering, Wuhan University, Wuhan 430072, China
International Joint Research Center for Surface and Interface Materials Science and Engineering, Wuhan University, Wuhan 430072, China
Shenzhen Research Institute of Wuhan University, Shenzhen 518057, China
Funding
National Natural Science Foundation of China · Shenzhen Science and Technology Program
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