Evolution of the Growth of a Micro-Nano Crystalline Diamond Film on an Axial Carbide Tool Model in Microwave Plasma
Source abstract
Abstract
Conformal multilayer micro-nanocrystalline diamond coatings were grown on substrates of a hard alloy with 9% Co with a high aspect number in microwave plasma from gas mixtures CH4/H2 and CH4/H2/N2. The substrates were of a cylindrical axial tool model with a size ratio: d = 12 mm to l = 75 mm. An original tool holder made of molybdenum, in the form of a sector of the excessive ring with the axis of the hole parallel to the central conductive platform, protects part of the substrate from heating due to the edge effect of plasma. The uniformity of heating of the growth part, which is located inside the excessive ring, is calculated using mathematical modeling and is provided by rotation at a speed of at least 12 rpm, which ensures the uniformity of the coating. The average grain size of the nanocrystalline film measured along the cylinder forming was 41 nm.
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Research context
OpenAlex topics: Diamond and Carbon-based Materials Research · Metal and Thin Film Mechanics · Advanced materials and composites
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Department of Light-Induced Surface Phenomena, Prokhorov General Physics Institute of the Russian Academy of Sciences, Vavilov Str. 38, 119991 Moscow, Russia
Department of High-Efficiency Machining Technologies, Moscow State University of Technology STANKIN, Vadkovskiy per. 3A, 127055 Moscow, Russia
Semiconductor Growth Laboratory MOCVD, Fryazinsky Branch of the V.A. Kotelnikov Institute of Radio Engineering and Electronics of the Russian Academy of Sciences, 1 Vvedensky Square, 141190 Fryazino, Russia
Department of Technological Systems, Moscow Polytechnic University, B. Semenovskaya Str. 38, 107023 Moscow, Russia
Funding
Russian Science Foundation
References (27)
Show source-provided references
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