Combined HF+MW CVD Approach for the Growth of Polycrystalline Diamond Films with Reduced Bow
Source abstract
Abstract
A combination of two methods of chemical vapor deposition (CVD) of diamond films, microwave plasma–assisted (MW CVD) and hot filament (HF CVD), was used for the growth of 100 µm-thick polycrystalline diamond (PCD) layers on Si substrates. The bow of HF CVD and MW CVD films showed opposite convex\concave trends; thus, the combined material allowed reducing the overall bow by a factor of 2–3. Using MW CVD for the growth of the initial 25 µm-thick PCD layer allowed achieving much higher thermal conductivity of the combined 110 µm-thick film at 210 W/m·K in comparison to 130 W/m·K for the 93 µm-thick pure HF CVD film.
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Research context
OpenAlex topics: Diamond and Carbon-based Materials Research · Metal and Thin Film Mechanics · Advanced materials and composites
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Prokhorov General Physics Institute of the Russian Academy of Sciences, 38 Vavilov Str., Moscow 119991, Russia
Kotel’nikov Institute of Radio Engineering and Electronics, Russian Academy of Sciences, 1 Vvedensky Sq., Fryazino 141190, Russia
Tomsk Polytechnic University, 30 Lenin Ave., Tomsk 634050, Russia
Institute for Advanced Materials and Technology, University of Science and Technology Beijing, Beijing 100083, China
MIREA—Russian Technological University, 78 Vernadsky Ave., Moscow 119454, Russia
Funding
Russian Science Foundation · National Natural Science Foundation of China
References (56)
Show source-provided references
1. Thermal Conductivity of High Purity Synthetic Single Crystal Diamonds10.1103/PhysRevB.97.144305 ↗
2. High Power (>27 W) Semiconductor Disk Laser Based on Pre-Metalized Diamond Heat-Spreader10.1109/JPHOT.2019.2908876 ↗
3. Li, X., Wang, X., Li, Y., and Liu, Y. (2020). Production and Heat Properties of an X-Ray Reflective Anode Based on a Diamond Heat Buffer Layer. Materials, 13.10.3390/ma13010241 ↗
4. A Diamond Made Microchannel Heat Sink for High-Density Heat Flux Dissipation10.1016/j.applthermaleng.2019.113804 ↗
5. Multifinger Indium Phosphide Double-Heterostructure Transistor Circuit Technology with Integrated Diamond Heat Sink Layer10.1109/TED.2016.2533669 ↗
6. Karczemska, A., Witkowski, D., Ralchenko, V., Bolshakov, A., Sovyk, D., Lysko, J., and Hassard, J. (2009, January 22–24). Diamond Microfluidic Devices Manufactured with the Replica Method. Proceedings of the 2009 5th International Conference on Perspective Technologies and Methods in MEMS Design, Lviv, Ukraine.
7. Surface Etching Evolution of Mechanically Polished Single Crystal Diamond with Subsurface Cleavage in Microwave Hydrogen Plasma: Topography, State and Electrical Properties10.1016/j.vacuum.2022.110932 ↗
8. Polycrystalline Diamond Films with Tailored Micro/Nanostructure/Doping for New Large Area Film-Based Diamond Electronics10.1016/j.diamond.2018.11.028 ↗
9. Single Crystal Diamond Wafers for High Power Electronics10.1016/j.diamond.2016.03.013 ↗
10. Multilayer Diamond Heat Spreaders for Electronic Power Devices10.1016/S0038-1101(98)00216-0 ↗
11. Reduced Self-Heating in AlGaN/GaN HEMTs Using Nanocrystalline Diamond Heat-Spreading Films10.1109/LED.2011.2171031 ↗
12. The 2018 GaN Power Electronics Roadmap10.1088/1361-6463/aaaf9d ↗
13. Qin, H., Luan, X., Feng, C., Yang, D., and Zhang, G. (2017). Mechanical, Thermodynamic and Electronic Properties of Wurtzite and Zinc-Blende GaN Crystals. Materials, 10.10.3390/ma10121419 ↗
14. GaN-Based Heterostructures with CVD Diamond Heat Sinks: A New Fabrication Approach towards Efficient Electronic Devices10.1016/j.apmt.2021.101338 ↗
15. Thermal Characterization of Polycrystalline Diamond Thin Film Heat Spreaders Grown on GaN HEMTs10.1063/1.4995407 ↗
16. Room Temperature GaN-Diamond Bonding for High-Power GaN-on-Diamond Devices10.1016/j.scriptamat.2018.03.016 ↗
17. An over 20-W/Mm S-Band InAlGaN/GaN HEMT with SiC/Diamond-Bonded Heat Spreader10.1109/LED.2018.2884918 ↗
18. Chemical Vapor Deposition Single-Crystal Diamond: A Review10.1002/pssr.202100354 ↗
19. Thermal Conductivity of Diamond Mosaic Crystals Grown by Chemical Vapor Deposition: Thermal Resistance of Junctions10.1103/PhysRevApplied.16.014049 ↗
20. Damage-Free Highly Efficient Plasma-Assisted Polishing of a 20-Mm Square Large Mosaic Single Crystal Diamond Substrate10.1038/s41598-020-76430-6 ↗
21. Sedov, V., Martyanov, A., Altakhov, A., Popovich, A., Shevchenko, M., Savin, S., Zavedeev, E., Zanaveskin, M., Sinogeykin, A., and Ralchenko, V. (2020). Effect of Substrate Holder Design on Stress and Uniformity of Large-Area Polycrystalline Diamond Films Grown by Microwave Plasma-Assisted CVD. Coatings, 10.10.3390/coatings10100939 ↗
22. Effect of Grain Boundary on Polycrystalline Diamond Polishing by High-Speed Dynamic Friction10.1016/j.diamond.2021.108461 ↗
23. Growth of 4″ diameter Polycrystalline Diamond Wafers with High Thermal Conductivity by 915 MHz Microwave Plasma Chemical Vapor Deposition10.1088/2058-6272/19/3/035503 ↗
24. Komlenok, M.S., Dezhkina, M.A., Sedov, V.S., Klimenko, O.A., Dyakov, S.A., and Gippius, N.A. (2022). Laser Ablated Nanocrystalline Diamond Membrane for Infrared Applications. Sensors, 22.10.3390/s22030829 ↗
25. Femtosecond and Nanosecond Laser Polishing of Rough Polycrystalline Diamond10.1088/1555-6611/ac732c ↗
26. Direct Visualization of Thermal Conductivity Suppression Due to Enhanced Phonon Scattering near Individual Grain Boundaries10.1021/acs.nanolett.8b00534 ↗
27. Simultaneous Determination of the Lattice Thermal Conductivity and Grain/Grain Thermal Resistance in Polycrystalline Diamond10.1016/j.actamat.2017.08.007 ↗
28. Thermal Properties of Bulk Polycrystalline CVD Diamond10.1016/0925-9635(94)90162-7 ↗
29. Measuring Local Thermal Conductivity in Polycrystalline Diamond with a High Resolution Photothermal Microscope10.1063/1.364329 ↗
30. Large-Area Diamond Deposition by Microwave Plasma10.1016/S0925-9635(96)00619-X ↗
31. Deposition of Diamond Films on Si by Microwave Plasma CVD in Varied CH4-H2 Mixtures: Reverse Nanocrystalline-to-Microcrystalline Structure Transition at Very High Methane Concentrations10.1016/j.diamond.2020.108072 ↗
32. Si-Doped Nano-and Microcrystalline Diamond Films with Controlled Bright Photoluminescence of Silicon-Vacancy Color Centers10.1016/j.diamond.2015.04.003 ↗
33. Growth of Polycrystalline and Single-Crystal CVD Diamonds with Bright Photoluminescence of Ge-V Color Centers Using Germane GeH4 as the Dopant Source10.1016/j.diamond.2018.10.001 ↗
34. Co-Deposition of Diamond and β-SiC by Microwave Plasma CVD in H2-CH4-SiH4 Gas Mixtures10.1016/j.diamond.2019.107520 ↗
35. CVD Diamond-SiC Composite Films: Structure and Electrical Properties10.1016/j.diamond.2022.108975 ↗
36. Diamond-Germanium Composite Films Grown by Microwave Plasma CVD10.1016/j.carbon.2022.01.003 ↗
37. Influence of Substrate Holder Configurations on Bias Enhanced Nucleation Area for Diamond Heteroepitaxy: Toward Wafer-Scale Single-Crystalline Diamond Synthesis
38. The 7-in. Freestanding Diamond Thermal Conductive Film Fabricated by DC Arc Plasma Jet CVD with Multi-Stage Magnetic Fields10.1016/j.diamond.2021.108812 ↗
39. Synthesis and Characterization of Microcrystalline Diamond to Ultrananocrystalline Diamond Films via Hot Filament Chemical Vapor Deposition for Scaling to Large Area Applications10.1016/j.tsf.2015.11.088 ↗
40. Improvement to the Adhesion of Polycrystalline Diamond Films on WC-Co Cemented Carbides through Ion Etching of Loosely Bound Growth Centers10.1016/j.surfcoat.2017.11.043 ↗
41. Thermal Conductivity of Diamond Films10.1063/1.347580 ↗
42. Effects of Carbon Concentration and Gas Pressure with Hydrogen-Rich Gas Chemistry on Synthesis and Characterizations of HFCVD Diamond Films on WC-Co Substrates10.1016/j.surfcoat.2021.126839 ↗
43. Laser Cladding of Vanadium Carbide Interlayer for CVD Diamond Growth on Steel Substrate10.1016/j.surfcoat.2021.127387 ↗
44. Evolutionary Selection, a Principle Governing Growth Orientation in Vapour-Deposited Layers
45. Growth Dynamics of Nanocrystalline Diamond Films Produced by Microwave Plasma Enhanced Chemical Vapor Deposition in Methane/Hydrogen/Air Mixture: Scaling Analysis of Surface Morphology10.1016/j.diamond.2015.07.002 ↗
46. A Comparative Study of the Growth Dynamics and Tribological Properties of Nanocrystalline Diamond Films Deposited on the (110) Single Crystal Diamond and Si (100) Substrates10.1016/j.diamond.2018.12.024 ↗
47. Relative Importance of Grain Boundaries and Size Effects in Thermal Conductivity of Nanocrystalline Materials10.1038/srep07037 ↗
48. The Measurement of Thermal Properties of Diamond10.1016/S0925-9635(96)00772-8 ↗
49. Plateholder Design for Deposition of Uniform Diamond Coatings on WC-Co Substrates by Microwave Plasma CVD for Efficient Turning Application10.1016/j.diamond.2017.04.011 ↗
50. High-Rate Growth of Single Crystal Diamond in Microwave Plasma in CH4/H2 and CH4/H2/Ar Gas Mixtures in Presence of Intensive Soot Formation10.1016/j.diamond.2015.12.001 ↗
51. Thermal Conductivity of CVD Diamond at Elevated Temperatures10.1016/j.diamond.2004.12.002 ↗
52. Residual Stress in Diamond and Amorphous Carbon Films10.1557/PROC-383-143 ↗
53. Influence of Al-Si-N Interlayer on Residual Stress of CVD Diamond Coatings10.1016/j.surfcoat.2018.10.030 ↗
54. Optimization of Residual Stresses inside Diamond Thin Films Grown by Hot Filament Chemical Vapor Deposition (HFCVD)10.1016/j.diamond.2022.109564 ↗
55. Vibrational Properties of Nitrogen-Doped Ultrananocrystalline Diamond Films Grown by Microwave Plasma CVD10.1016/j.diamond.2007.07.007 ↗
56. Influence of Neutron Irradiation on the Thermal Conductivity of Vapor-Deposited Diamond10.1063/1.357727 ↗