P-type (CuTi)Ox Thin Films Deposited by Magnetron Co-Sputtering and Their Electronic and Hydrogen Sensing Properties
Source abstract
Abstract
Thin films of copper oxide (CuxO), titanium oxide (TiOx), and several mixtures of copper and titanium oxides ((CuTi)Ox) were deposited using magnetron sputtering. X-ray diffraction analysis of the as-deposited TiOx thin film revealed the presence of TiO crystallites, while in the case of (CuTi)Ox with the lowest amount of copper, metallic Cu crystallites were found. In the case of (Cu0.77Ti0.23)Ox and CuxO thin films, characteristic peaks for metallic copper and copper oxides were observed in their diffractograms. It was found that post-process annealing at 473 K considerably affects the microstructure of (CuTi)Ox thin films. After annealing, anatase phase was observed in (Cu0.23Ti0.77)Ox and (Cu0.41Ti0.59)Ox thin films. In turn, the (Cu0.77Ti0.23)Ox and CuxO films were formed only in the copper oxide phase. The (Cu0.77Ti0.23)Ox film annealed at 473 K showed the best opto-electronic performance, as it had the highest transmission and the lowest resistivity. However, the greatest advantage of this thin film was the p-type semiconducting behavior, which was the strongest of all of the thin films in this work, as indicated by the measurement of the Seebeck coefficient. All deposited thin films were sensitive to hydrogen exposure, while the best sensor response of 10.9 was observed for the (Cu0.77Ti0.23) Ox thin film annealed at 473 K.
Source: crossref · Quality: baseline
Research context
OpenAlex topics: ZnO doping and properties · Copper-based nanomaterials and applications · Gas Sensing Nanomaterials and Sensors
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Faculty of Electronic, Photonics and Microsystems, Wrocław University of Science and Technology, Janiszewskiego 11/17, 50-372 Wrocław, Poland
Funding
Polish National Science Center (NCN)
References (65)
Show source-provided references
1. Investigation of a Memory Effect in a Au/(Ti–Cu)Ox-Gradient Thin Film/TiAlV Structure10.3762/bjnano.13.21 ↗
2. An Impact of the Copper Additive on Photocatalytic and Bactericidal Properties of TiO2 Thin Films10.1515/msp-2017-0041 ↗
3. Perspectives of Development of TCO and TOS Thin Films Based on (Ti-Cu)Oxide Composites10.1016/j.surfcoat.2015.09.028 ↗
4. TiO2 Photocatalysis: Design and Applications10.1016/j.jphotochemrev.2012.06.001 ↗
5. Sol-Gel Electrochromic Coatings and Devices: A Review10.1016/S0927-0248(00)00369-X ↗
6. TiO2/SnO2 and TiO2/CuO Thin Film Nano-Heterostructures as Gas Sensors10.1016/j.apsusc.2019.02.139 ↗
7. Nunes, D., Pimentel, A., Goncalves, A., Pereira, S., Branquinho, R., Barquinha, P., Fortunato, E., and Martins, R. (2019). Metal Oxide Nanostructures for Sensor Applications. Semicond. Sci. Technol., 34.10.1088/1361-6641/ab011e ↗
8. Wojcieszak, D., Obstarczyk, A., Mańkowska, E., Mazur, M., Kaczmarek, D., Zakrzewska, K., Mazur, P., and Domaradzki, J. (2022). Thermal Oxidation Impact on the Optoelectronic and Hydrogen Sensing Properties of P-Type Copper Oxide Thin Films. Mater. Res. Bull., 147.10.1016/j.materresbull.2021.111646 ↗
9. Photocatalytic Coatings Based on TiOx for Application on Flexible Glass for Photovoltaic Panels10.1007/s11665-022-06655-1 ↗
10. Nanostructured Copper Oxide Semiconductors: A Perspective on Materials, Synthesis Methods and Applications10.1039/C4TC00345D ↗
11. Composite Titanium Dioxide Nanomaterials10.1021/cr400634p ↗
12. Rydosz, A. (2018). The Use of Copper Oxide Thin Films in Gas-Sensing Applications. Coatings, 8.10.3390/coatings8120425 ↗
13. Low Pressure CVD of Transparent Cu-Al-O and Cu-Ti-O Thin Films
14. Recent Developments in P-Type Oxide Semiconductor Materials and Devices10.1002/adma.201503080 ↗
15. P-Type Cu-Ti-O Nanotube Arrays and Their Use in Self-Biased Heterojunction Photoelectrochemical Diodes for Hydrogen Generation10.1021/nl080572y ↗
16. Thin-Film Transistors Based on p-Type Cu2O Thin Films Produced at Room Temperature
17. TiO2/SiO2 Multilayer as an Antireflective and Protective Coating Deposited by Microwave Assisted Magnetron Sputtering10.2478/s11772-013-0085-7 ↗
18. Effect of RF Power and Sputtering Pressure on the Structural and Optical Properties of TiO2 Thin Films Prepared by RF Magnetron Sputtering10.1016/j.apsusc.2011.07.125 ↗
19. Analysis of Electrical Properties of Forward-to-Open (Ti,Cu)Ox Memristor Rectifier with Elemental Gradient Distribution Prepared Using (Multi)Magnetron Co-Sputtering Process10.1016/j.mssp.2019.01.034 ↗
20. Copper Doping in Titanium Oxide Catalyst Film Prepared by Dc Reactive Magnetron Sputtering10.1016/j.cattod.2004.06.009 ↗
21. Preparation of Heterogenous Copper-Titanium Oxides for Chemiresistor Applications10.1016/j.matpr.2020.05.061 ↗
22. Torrisi, A., Ceccio, G., Cannav, A., Lavrentiev, V., Hor, P., Yatskiv, R., Vaniš, J., Grym, J., Fišer, L., and Hruška, M. (2021). Chemiresistors Based on Li-Doped CuO-TiO2 Films. Chemosensors, 9.10.3390/chemosensors9090246 ↗
23. Novel Synthesis and Gas Sensing Performances of CuO-TiO2 Nanocomposites Functionalized with Au Nanoparticles10.1021/jp202449k ↗
24. Kubiak, A., Bielan, Z., Kubacka, M., Gabała, E., Zgoła-Grześkowiak, A., Janczarek, M., Zalas, M., Zielińska-Jurek, A., Siwińska-Ciesielczyk, K., and Jesionowski, T. (2020). Microwave-Assisted Synthesis of a TiO2-CuO Heterojunction with Enhanced Photocatalytic Activity against Tetracycline. Appl. Surf. Sci., 520.10.1016/j.apsusc.2020.146344 ↗
25. Growth, Structure and Photocatalytic Properties of Hierarchical Cu-Ti-O Nanotube Arrays by Anodization10.1016/j.jallcom.2010.04.099 ↗
26. The Study of Microstructure, Optical and Photocatalytic Properties of Nanoparticles(NPs)-Cu/TiO2 Films Deposited by Magnetron Sputtering10.1016/j.jallcom.2015.08.117 ↗
27. Fouad, S.S., Baradács, E., Nabil, M., Parditka, B., Negm, S., and Erdélyi, Z. (2022). Microstructural and Optical Duality of TiO2/Cu/TiO2 Trilayer Films Grown by Atomic Layer Deposition and DC Magnetron Sputtering. Inorg. Chem. Commun., 145.10.1016/j.inoche.2022.110017 ↗
28. Synthesis of Cu/TiO2 Catalysts by Reactive Magnetron Sputtering Deposition and Its Application for Photocatalytic Reduction of CO2 and H2O to CH410.1016/j.ceramint.2019.07.340 ↗
29. Antibacterial Ability and Angiogenic Activity of Cu-Ti-O Nanotube Arrays10.1016/j.msec.2016.09.077 ↗
30. A Comprehensive Study on Sunlight Driven Photocatalytic Hydrogen Generation Using Low Cost Nanocrystalline Cu-Ti Oxides10.1016/j.solmat.2016.04.036 ↗
31. Manjunath, K., Souza, V.S., Ramakrishnappa, T., Nagaraju, G., Scholten, J.D., and Dupont, J. (2016). Heterojunction CuO-TiO2 Nanocomposite Synthesis for Significant Photocatalytic Hydrogen Production. Mater. Res. Express, 3.10.1088/2053-1591/3/11/115904 ↗
32. CuOx-TiO2 Junction: What Is the Active Component for Photocatalytic H2 Production?10.1039/c3cp52496e ↗
33. Cu/TiO2 Thin Films Prepared by Reactive RF Magnetron Sputtering10.1007/s00339-015-9254-5 ↗
34. Investigations of Elemental Composition and Structure Evolution in (Ti,Cu)-Oxide Gradient Thin Films Prepared Using (Multi)Magnetron Co-Sputtering10.1016/j.surfcoat.2017.11.038 ↗
35. Analysis of Surface Properties of Ti-Cu-Ox Gradient Thin Films Using AFM and XPS Investigations10.2478/msp-2018-0100 ↗
36. Multilayered Cu–Ti Deposition on Silicon Substrates for Chemiresistor Applications10.1080/10426507.2020.1804166 ↗
37. On the Performances of CuxO-TiO2 (x = 1, 2) Nanomaterials as Innovative Anodes for Thin Film Lithium Batteries10.1021/am300678t ↗
38. Investigation of the Structural and Optical Properties of Copper-Titanium Oxide Thin Films Produced by Changing the Amount of Copper10.1016/j.tsf.2019.06.052 ↗
39. Powder Diffraction File, Joint Commiittee on Powder Diffraction Standards (Standard No. PDF Card 04-0836).
40. Powder Diffraction File, Joint Commiittee on Powder Diffraction Standards (Standard No. PDF Card 65-3288).
41. Powder Diffraction File, Joint Commiittee on Powder Diffraction Standards (Standard No. PDF Card 65-2309).
42. Powder Diffraction File, Joint Commiittee on Powder Diffraction Standards (Standard No. PDF Card 65-2900).
43. Powder Diffraction File, Joint Commiittee on Powder Diffraction Standards (Standard No. PDF Card 21-1272).
44. The Scherrer Equation versus the “Debye-Scherrer Equation”10.1038/nnano.2011.145 ↗
45. Measurements of the Seebeck Coefficient of Thermoelectric Materials by an AC Method10.1007/BF02575185 ↗
46. Synthesis, Properties, and Ternary Phase Stability of M6X Compounds in the Ti—Cu—O System10.1111/j.1151-2916.1993.tb06652.x ↗
47. Oxide Films Formed on Titanium, Zirconia, and Their Alloys with Nickel, Copper, and Cobalt10.1021/ac60014a016 ↗
48. Synthesis and Hydrogen Gas Sensing Properties of TiO2-Decorated CuO Nanorods10.1002/bkcs.10473 ↗
49. TiO2 Thin Films with Rutile Phase Prepared by DC Magnetron Co-Sputtering at Room Temperature: Effect of Cu Incorporation10.1016/j.apsusc.2015.03.106 ↗
50. Electrical and Optical Properties of TiOx Thin Films Deposited by Reactive Magnetron Sputtering10.1016/S0257-8972(01)01605-X ↗
51. Optical Constants of Titanium Monoxide TiO Thin Films10.1016/j.jallcom.2007.10.059 ↗
52. Synthesis and Characterization of Conductive Titanium Monoxide Films. Diffusion of Silicon in Titanium Monoxide Films10.1016/S0042-207X(98)00149-3 ↗
53. Preparation of Black Titanium Monoxide Nanoparticles and Their Potential in Electromagnetic Wave Absorption10.1016/j.apt.2020.06.032 ↗
54. Preparation of Inkjet-Printed Titanium Monoxide as p-Type Absorber Layer for Photovoltaic Purposes10.1016/j.tsf.2014.09.054 ↗
55. Study of Structure Densification in TiO2 Coatings Prepared by Magnetron Sputtering under Low Pressure of Oxygen Plasma Discharge10.12693/APhysPolA.120.49 ↗
56. Effect of Oxygen Partial Pressure on the Optical Property of Amorphous Titanium Oxide Thin Films10.1016/j.egypro.2011.10.060 ↗
57. Effect of Post-Annealing on the Properties of Copper Oxide Thin Films Obtained from the Oxidation of Evaporated Metallic Copper10.1016/j.apsusc.2007.12.019 ↗
58. Nanoscale Metal Oxide-Based Heterojunctions for Gas Sensing: A Review10.1016/j.snb.2014.07.074 ↗
59. Conduction Model of Metal Oxide Gas Sensors10.1023/A:1014405811371 ↗
60. Grain-Size-Dependent Gas-Sensing Properties of TiO2 Nanomaterials10.1016/j.snb.2015.01.050 ↗
61. Rydosz, A., Czapla, A., Maziarz, W., Zakrzewska, K., and Brudnik, A. (2018, January 17–20). CuO and CuO/TiO2-y Thin-Film Gas Sensors of H2 and NO2. Proceedings of the 2018 XV International Scientific Conference on Optoelectronic and Electronic Sensors (COE), Warsaw, Poland.10.1109/COE.2018.8435156 ↗
62. Influence of Humidity on CO Sensing with P-Type CuO Thick Film Gas Sensors10.1016/j.snb.2010.10.046 ↗
63. Improved Gas Sensing Performance of P-Copper Oxide Thin Film/n-TiO2 Nanotubes Heterostructure10.1016/j.jallcom.2018.03.268 ↗
64. Sputtered TiO2 Thin Films with NiO Additives for Hydrogen Detection10.1016/j.apsusc.2012.09.061 ↗
65. TiO2/Cu2O/CuO Multi-Nanolayers as Sensors for H2 and Volatile Organic Compounds: An Experimental and Theoretical Investigation10.1021/acsami.1c04379 ↗