Plasma Bombardment-Induced Amorphization of (TiNbZrCr)Nx High-Entropy Alloy Nitride Films
Source abstract
Abstract
The (TiNbZrCr)Nx high-entropy nitride films (HENFs) were prepared by high-power pulsed magnetron sputtering (HPPMS). The effect of the N2 flow rate (FN) on the HPPMS plasma discharge, film composition, microstructure, residual stress, tribological properties, and corrosion resistance was investigated. Results show that, with the increase in FN, plasma discharge is enhanced. Firstly, the introduced N atoms react with Ti, Nb, Cr, and Zr to form an FCC nitride phase structure. Then, with the increase in plasma bombardment on the deposited film, the HENFs undergo amorphization to form an FCC+ amorphous structure, accompanied by a decrease in grain size and a change in the preferred orientation from (1 1 1) to (2 0 0). The HENFs deposited at FN = 8 sccm show the highest hardness of 27.8 GPa. The HENFs deposited at FN = 12 sccm present the best tribological properties, with a low wear rate of 4.0 × 10−6 mm3N−1m−1. The corrosion resistance of the (TiNbZrCr)Nx HENFs shows a strong correlation with the amorphous phase. The corrosion resistance of the FCC nitride film is the worst, and the corrosion resistance gradually increases with the amorphous transformation of the film. Based on the above results, nanocomposite high-entropy films can be prepared using HPPMS technology and exhibit excellent, comprehensive performance.
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Research context
OpenAlex topics: High Entropy Alloys Studies · Metal and Thin Film Mechanics · High-Temperature Coating Behaviors
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
School of Mechanical and Electrical Engineering, Mianyang Teachers’ College, Mianyang 621000, China
College of Physics and Engineering, Chengdu Normal University, Chengdu 611130, China
Key Laboratory of Advanced Technologies of Materials, Ministry of Education, School of Materials Science and Engineering, Southwest Jiaotong University, Chengdu 610031, China
Sichuan Province International Science and Technology Cooperation Base of Functional Materials, College of Medicine, Southwest Jiaotong University, Chengdu 610031, China
Funding
National Natural Science Foundation of China · Sichuan Provincial Department of Science and Technology · Sichuan College Student Innovation Training Program
References (35)
Show source-provided references
1. Microstructures and properties of high-entropy alloy films and coatings: A review10.1080/21663831.2018.1434248 ↗
2. Stable nanocrystalline NbMoTaW high entropy alloy thin films with excellent mechanical and electrical properties10.1016/j.matlet.2017.08.129 ↗
3. Synthesis and characterization of super-hard AlCrTiVZr high-entropy alloy nitride films deposited by HiPIMS10.1016/j.apsusc.2020.146529 ↗
4. Structural and mechanical properties of multi-element (AlCrMoTaTiZr)Nx coatings by reactive magnetron sputtering10.1016/j.tsf.2010.11.034 ↗
5. Tribo-mechanical properties of CrNbTiMoZr high-entropy alloy film synthesized by direct current magnetron sputtering10.1016/j.surfcoat.2020.126374 ↗
6. Effect of heat-treatment time on microstructure and tribological behavior of (TiVCrAlMo)N high-entropy alloy films10.1016/j.surfcoat.2022.128618 ↗
7. Synthesis and Mechanical Characterization of a CuMoTaWV High-Entropy Film by Magnetron Sputtering10.1021/acsami.0c02156 ↗
8. Thermal stability and oxidation resistance of FeCrxCoNiB high-entropy alloys coatings by laser cladding10.1016/j.surfcoat.2018.12.072 ↗
9. Enhancing radiation tolerance by controlling defect mobility and migration pathways in multicomponent single-phase alloys10.1038/ncomms13564 ↗
10. Radiation-induced segregation on defect clusters in single-phase concentrated solid-solution alloys10.1016/j.actamat.2017.01.019 ↗
11. Passivation behavior of VAlTiCrSi amorphous high-entropy alloy film with a high corrosion-resistance in artificial sea water10.1016/j.apsusc.2020.148520 ↗
12. Evolution of microstructure, mechanical and corrosion properties of AlCoCrFeNi high-entropy alloy prepared by direct laser fabrication10.1016/j.jallcom.2016.10.138 ↗
13. Tuning microstructure and mechanical and wear resistance of ZrNbTiMo refractory high-entropy alloy films via sputtering power10.3389/fmats.2023.1145631 ↗
14. The nanostructure and mechanical properties of nanocomposite Nbx-CoCrCuFeNi thin films10.1016/j.scriptamat.2017.06.046 ↗
15. Silicon-content-dependent microstructures and mechanical behavior of (AlCrTiZrMo)-Six-N high-entropy alloy nitride films10.1016/j.matdes.2021.109553 ↗
16. Nano dual-phase CuNiTiNbCr high entropy alloy films produced by high-power pulsed magnetron sputtering10.1016/j.surfcoat.2021.127325 ↗
17. Evolution of the plasma composition of a high power impulse magnetron sputtering system studied with a time-of-flight spectrometer10.1063/1.3125443 ↗
18. On the role of the energetic species in TiN thin film growth by reactive deep oscillation magnetron sputtering in Ar/N210.1016/j.tsf.2017.10.052 ↗
19. Discharge physics of high power impulse magnetron sputtering10.1016/j.surfcoat.2011.03.081 ↗
20. Current-voltage-time characteristics of the reactive Ar/N2 high power impulse magnetron sputtering discharge10.1063/1.3653233 ↗
21. Super-hard and anti-corrosion (AlCrMoSiTi)Nx high entropy nitride coatings by multi-arc cathodic vacuum magnetic filtration deposition10.1016/j.vacuum.2021.110685 ↗
22. Microstructure and properties of the AlCrMoZrTi/(AlCrMoZrTi)N multilayer high-entropy nitride ceramics films deposited by reactive RF sputtering10.1016/j.ceramint.2022.02.245 ↗
23. Effects of nitrogen content on microstructures and mechanical properties of (AlCrTiZrHf)N high-entropy alloy nitride films10.1016/j.jallcom.2020.155063 ↗
24. Effect of asynchronous pulsing parameters on the structure and properties of CrAlN films deposited by pulsed closed field unbalanced magnetron sputtering (P-CFUBMS)10.1016/j.surfcoat.2007.06.068 ↗
25. Structure and properties of two Al–Cr–Nb–Si–Ti high-entropy nitride coatings10.1016/j.surfcoat.2013.01.036 ↗
26. A comprehensive model of stress generation and relief processes in thin films deposited with energetic ions10.1016/j.surfcoat.2005.02.161 ↗
27. Residual stress control in TiN/Si coatings deposited by unbalanced magnetron sputtering10.1016/j.surfcoat.2005.06.004 ↗
28. Hard yet tough and self-lubricating (CuNiTiNbCr)Cx high-entropy nanocomposite films: Effects of carbon content on structure and properties10.1016/j.jmst.2023.05.082 ↗
29. Improvement of high entropy alloy nitride coatings (AlCrNbSiTiMo)N on mechanical and high temperature tribological properties by tuning substrate bias10.1016/j.surfcoat.2020.126247 ↗
30. Reactive wear protection through strong and deformable oxide nanocomposite surfaces10.1038/s41467-021-25778-y ↗
31. Effect of bias voltage on the structure and properties of CuNiTiNbCr dual-phase high entropy alloy films10.1016/j.jallcom.2022.167371 ↗
32. Fabrication and characterization of CrNbSiTiZr high-entropy alloy films by radio-frequency magnetron sputtering via tuning substrate bias10.1016/j.surfcoat.2021.127074 ↗
33. Wettability, electron work function and corrosion behavior of CoCrFeMnNi high entropy alloy films10.1016/j.surfcoat.2020.126222 ↗
34. Electronic-structure, corrosion and mechanical properties of nc-CrC/a-C:H films deposited by multi-arc ion plating10.1016/j.jallcom.2018.04.017 ↗
35. A feasible method for the fabrication of VAlTiCrSi amorphous high entropy alloy film with outstanding anti-corrosion property10.1016/j.apsusc.2019.03.338 ↗