Optical Coating Deposition on Submicron-Patterned Surfaces
Source abstract
Abstract
Periodically modulated optical coatings, fabricated by depositing conformal films on modulated substrates, offer unique capabilities for spectral and spatial filtering of light. However, conventional deposition methods often do not achieve required replication and conformality on submicron-size structured surfaces. In this paper, we compare various thin film deposition techniques, including electron beam evaporation, atomic layer deposition, and ion beam sputtering, to evaluate their ability to control multilayer coating growth on periodically modulated substrates. Our study demonstrates that both single-layer and multilayer coatings produced by ion beam sputtering effectively replicate the initial geometry of structured surfaces, thereby enhancing optical performance.
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Research context
OpenAlex topics: Semiconductor materials and devices · Optical Coatings and Gratings · Nanofabrication and Lithography Techniques
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Center for Physical Sciences and Technology (FTMC), Savanoriu Ave. 231, LT-02300 Vilnius, Lithuania
Funding
the Research Council of Lithuania (LMTLT) · Horizon 2020 ERA.NET-COFUND program project MiLaCo
References (43)
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