Microstructure and Mechanical Properties of Co-Deposited Ti-Ni Films Prepared by Magnetron Sputtering
Source abstract
Abstract
Ti-Ni films with various Ni contents (16.5, 22.0, 33.5 at. %) were deposited on Al alloy substrates using DC magnetron co-sputtering. The effects of Ni target power and substrate bias (−10, −70, −110 V) on morphologies, crystallography, nanomechanical properties and scratch behavior of films were studied. All the deposited Ti-Ni films exhibited a BCC structure of β-Ti (Ni). The Ti-Ni films grew with a normal columnar structure with good bonding to substrates. When increasing the Ni target power and substrate bias, the grain size grew larger and the surface became denser. The as-deposited Ti-Ni films significantly improved the hardness (>4 GPa) of the Al alloy substrate. With the increase of bias voltage, the hardness and modulus of the film increased. The hardness and modulus of the Ti-22.0Ni film prepared at −70 V bias were 5.17 GPa and 97.6 GPa, respectively, and it had good adhesion to the substrate.
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Research context
OpenAlex topics: Metal and Thin Film Mechanics · Intermetallics and Advanced Alloy Properties · Advanced materials and composites
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Avic Chengfei Commercial Aircraft Co., Ltd., Chengdu 610092, China
Tianjin Key Laboratory of Materials Laminating Fabrication and Interface Control Technology, School of Material Science and Engineering, Hebei University of Technology, Tianjin 300130, China
Funding
National Natural Science Foundation of China
References (43)
Show source-provided references
1. Novel bioactive Ti-Zn alloys with high strength and low modulus for biomedical applications10.1016/j.jallcom.2022.167555 ↗
2. Development of a porous Ti-35Nb-5In alloy with low elastic modulus for biomedical implants10.1016/j.jmrt.2022.12.011 ↗
3. The improved corrosion and wear properties of Ti-Zr based alloys with oxide coating in simulated seawater environment10.1016/j.surfcoat.2022.128415 ↗
4. A Review on Biomedical Titanium Alloys: Recent Progress and Prospect10.1002/adem.201801215 ↗
5. Metallic Implant biomaterials10.1016/j.mser.2014.10.001 ↗
6. Celesti, C., Gervasi, T., Cicero, N., Giofrè, S.V., Espro, C., Piperopoulos, E., Gabriele, B., Mancuso, R., Vecchio, G.L., and Iannazzo, D. (2022). Titanium Surface Modification for Implantable Medical Devices with Anti-Bacterial Adhesion Properties. Materials, 15.10.3390/ma15093283 ↗
7. Morphological study of magnetron sputtered Ti thin films on silicon substrate10.1016/j.matchemphys.2008.04.048 ↗
8. Effect of sputtering power on surface topography of dc magnetron sputtered Ti thin films observed by AFM10.1016/j.apsusc.2008.12.029 ↗
9. Effect of bias voltage on microstructure and nanomechanical properties of Ti films10.1016/S1003-6326(14)63420-8 ↗
10. Growth of ultrathin Ti films deposited on SnO2 by magnetron sputtering10.1016/S0040-6090(03)00605-9 ↗
11. Microstructural characterizations of magnetron sputtered Ti films on glass substrate10.1016/j.jmatprotec.2008.08.004 ↗
12. Link between plasma properties with morphological, structural and mechanical properties of thin Ti films deposited by high power impulse magnetron sputtering10.1016/j.surfcoat.2021.127235 ↗
13. A high strength and low modulus metastable β Ti-12Mo-6Zr-2Fe alloy fabricated by laser powder bed fusion in-situ alloying
14. Microwave sintering of porous Ti–Nb-HA composite with high strength and enhanced bioactivity for implant applications10.1016/j.jallcom.2020.153774 ↗
15. Influence of different grained powders and pellets made of Niobium and Ti-42Nb on human cell viability10.1016/j.msec.2016.12.098 ↗
16. Liu, L., Li, W., Sun, H., and Wang, G. (2022). Effects of Ti Target Purity and Microstructure on Deposition Rate, Microstructure and Properties of Ti Films. Materials, 15.10.3390/ma15072661 ↗
17. Surface structure and composition of flat titanium thin films as a function of film thickness and evaporation rate10.1016/j.apsusc.2005.01.013 ↗
18. Effects of radio-frequency plasma on structure and properties in Ti film deposition by dc and pulsed dc magnetron sputtering10.1016/j.tsf.2009.03.055 ↗
19. Bălţatu, M.S., Vizureanu, P., Goanţă, V., Ţugui, C.A., and Voiculescu, I. (2019). Mechanical Tests for Ti-Based Alloys as New Medical Materials, IOP Publishing.10.1088/1757-899X/572/1/012029 ↗
20. Structure and grindability of dental Ti-Cr alloys10.1016/j.jallcom.2008.09.116 ↗
21. Effects of Mo content on corrosion and tribocorrosion behaviours of Ti-Mo orthopaedic alloys fabricated by powder metallurgy10.1016/j.corsci.2020.108557 ↗
22. Nanoindentational and conventional mechanical properties of spark plasma sintered Ti-Mo alloys10.1016/j.jmrt.2020.07.066 ↗
23. Structure-property relationship of cast Ti-Nb alloys10.1046/j.1365-2842.2002.00825.x ↗
24. Assessment of β stabilizers additions on microstructure and properties of as-cast β Ti–Nb based alloys10.1016/j.jmrt.2022.12.144 ↗
25. Effect of Nb content on the microstructure and mechanical properties of binary Ti-Nb alloys
26. Microstructure and nanomechanical properties of magnetron sputtered Ti-Nb films10.1016/j.surfcoat.2016.06.014 ↗
27. Microstructure and nanomechanical properties of co-deposited Ti-Cr films prepared by magnetron sputtering10.1016/j.surfcoat.2017.07.005 ↗
28. The phase, morphology and surface characterization of Ti–Mo alloy films prepared by magnetron sputtering10.1039/C7RA10510J ↗
29. Multifunctional Ti–Me (Me = Al, Cu) thin film systems for biomedical sensing devices10.1016/j.vacuum.2015.05.015 ↗
30. Deposition of thin titanium–copper films with antimicrobial effect by advanced magnetron sputtering methods10.1016/j.msec.2011.06.009 ↗
31. Nanoimprinting of Ti–Cu-based thin-film metallic glasses deposited by unbalanced magnetron sputtering10.1016/j.jallcom.2016.11.174 ↗
32. Influence of the surface properties on bactericidal and fungicidal activity of magnetron sputtered Ti-Ag and Nb-Ag thin films10.1016/j.msec.2016.01.029 ↗
33. On the effect of alloy composition on martensite start temperatures and latent heats in Ni–Ti-based shape memory alloys10.1016/j.actamat.2015.02.029 ↗
34. Electric resistance phenomena in porous Ni-Ti shape-memory alloys produced by SHS10.1016/S1359-6462(00)00653-9 ↗
35. Tailoring of microstructure and martensitic transformation of nanocrystalline Ti–Ni-Hf shape memory thin film10.1016/j.pnsc.2020.12.010 ↗
36. High damping performances over wide temperature range in the B doped Ti-Ni shape memory alloys10.1016/j.matlet.2022.133245 ↗
37. Synthesis of co-sputter deposited Ni–Ti thin alloy films and their compositional characterization using depth sensitive techniques10.1016/j.tsf.2020.137800 ↗
38. Zhang, Microstructure and properties of equiatomic Ti–Ni alloy fabricated by selective laser melting10.1016/j.msea.2019.138586 ↗
39. Effect of nitrogen flow ratio on microstructure, mechanical and tribological properties of TiWSiNx thin film deposited by magnetron co-sputtering10.1016/j.apsusc.2018.06.129 ↗
40. Study of the structure, properties, scratch resistance and deformation behaviour of graded Cr-CrN-Cr(1-x)AlxN coatings10.1016/j.ceramint.2018.03.187 ↗
41. Scratch response and tribological behaviour of CrAlNiN coatings deposited by closed field unbalanced magnetron sputtering system10.1016/j.surfcoat.2019.03.053 ↗
42. Evaluation of PVD nitride coatings, using impact, scratch and Rockwell-C adhesion tests10.1016/0040-6090(95)06934-8 ↗
43. The effects of the H/E ratio of various Cr–N interlayers on the adhesion strength of CrZrN coatings on tungsten carbide substrates10.1016/j.surfcoat.2015.06.077 ↗