Improvement of the Microstructure and X-ray Performance of Ultrathin Ru/C Multilayer Mirror after High Temperature Treatment
Source abstract
Abstract
Ru/C multilayer mirrors with a period of 2.5 nm and 150 bilayers were studied under high-temperature annealing and long-term storage. A general increase in the reflectivity was observed after annealing at different temperatures from 300 to 700 °C, during which a maximum enhancement of around 14% was obtained at 600 °C. The highest reflectance measured at 8 keV reached 69% after 600 °C annealing. This was accompanied by a 6% expansion of the layer period, which could be mainly attributed to carbon layers. The surface roughness was not affected by the annealing, whereas the polycrystallization of Ru with crystallographic planes parallel to the layer interfaces was enhanced. Combining the transmission-electron microscopy measurements, it was found that the interdiffusion at the C-on-Ru interface was significantly suppressed. The decreased interdiffusion, enhanced optical contrast, and larger multilayer period were the main reasons for the increased reflectance. The 600 °C annealed Ru/C multilayer remained intact after 13 months of storage in air, which also demonstrated significant temporal stability.
Source: crossref · Quality: baseline
Research context
OpenAlex topics: Magnetic properties of thin films · Metal and Thin Film Mechanics · Ion-surface interactions and analysis
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Key Laboratory of Advanced Micro-Structured Materials, MOE, Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai 200092, China
Department of Physics, Shanghai University, Shanghai 200444, China
Funding
National Natural Science Foundation of China · National Key R&D Program of China · Shanghai Rising-Star Program · Major projects of Science and Technology Commission of Shanghai · Shanghai Municipal Science and Technology Major Project
References (25)
Show source-provided references
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