Special Issue “Magnetron Sputtering Deposited Thin Films and Its Applications”
Source abstract
Abstract
The physical vapour deposition processes, and in particular different variants of sputtering, have reached a maturity making possible industrial applications in numerous fields such as mechanics [...]
Only a short abstract or summary was supplied by the source.
Source: crossref · Quality: short
Research context
OpenAlex topics: Metal and Thin Film Mechanics · Semiconductor materials and devices · ZnO doping and properties
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
ICD LASMIS, LRC UTT-CEA Nicci, Univ Technol Troyes, Antenne Nogent, Pole Technol Sud Champagn, F-52800 Nogent, France
FEMTO-ST, Université de Bourgogne-Franche Comté, Plateforme SURFACE de Montbéliard, UTBM—90010 Belfort CEDEX, France
References (20)
Show source-provided references
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