Finite Element Analysis of Nanoindentation Responses in Bi2Se3 Thin Films
Source abstract
Abstract
In this study, the nanoindentation responses of Bi2Se3 thin film were quantitatively analyzed and simulated by using the finite element method (FEM). The hardness and Young’s modulus of Bi2Se3 thin films were experimentally determined using the continuous contact stiffness measurements option built into a Berkovich nanoindenter. Concurrently, FEM was conducted to establish a model describing the contact mechanics at the film/substrate interface, which was then used to reproduce the nanoindentation load-depth and hardness-depth curves. As such, the appropriate material parameters were obtained by correlating the FEM results with the corresponding experimental load-displacement curves. Moreover, the detailed nanoindentation-induced stress distribution in the vicinity around the interface of Bi2Se3 thin film and c-plane sapphires was mapped by FEM simulation for three different indenters, namely, the Berkovich, spherical and flat punch indenters. The results indicated that the nanoindentation-induced stress distribution at the film/substrate interface is indeed strongly dependent on the indenter’s geometric shape.
Source: crossref · Quality: baseline
Research context
OpenAlex topics: Metal and Thin Film Mechanics · Topological Materials and Phenomena · Force Microscopy Techniques and Applications
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Department of Materials Science and Engineering, I-Shou University, Kaohsiung 84001, Taiwan
Department of Mechanical and Electro-Mechanical Engineering, National Sun Yat-sen University, Kaohsiung 80424, Taiwan
Department of Applied Physics, National University of Kaohsiung, Kaohsiung 81148, Taiwan
Department of Fragrance and Cosmetic Science, College of Pharmacy, Kaohsiung Medical University, Kaohsiung 80708, Taiwan
Department of Physics and Biophysics, Faculty of Basic Sciences, Can Tho University of Medicine and Pharmacy, Can Tho City 94000, Vietnam
Department of Chemical Engineering, College of Engineering Technology, Can Tho University, Can Tho City 900000, Vietnam
Department of Materials Engineering, Ming Chi University of Technology, New Taipei City 24301, Taiwan
Department of Electrophysics, National Yang Ming Chiao Tung University, Hsinchu 30010, Taiwan
Funding
Ministry of Science and Technology, Taiwan
References (30)
Show source-provided references
1. A topological Dirac insulator in a quantum spin Hall phase10.1038/nature06843 ↗
2. Observation of a larger-gap topological-insulator class with a single Dirac cone on the surface10.1038/nphys1274 ↗
3. Topological insulators and superconductors10.1103/RevModPhys.83.1057 ↗
4. Topological Insulator Bi2Se3 Nanowire High Performance Field-Effect Transistors10.1038/srep01757 ↗
5. Structure and doping determined thermoelectric properties of Bi2Se3 thin films deposited by vapour-solid technique10.1109/TNANO.2019.2939862 ↗
6. Spin polarization and transport of surface states in the topological insulators Bi2Se3 and Bi2Te3 from first principles10.1103/PhysRevLett.105.266806 ↗
7. Lai, H.-D., Jian, S.-R., Tuyen, L.T.C., Le, P.H., Luo, C.-W., and Juang, J.-Y. (2018). Nanoindentation of Bi2Se3 Thin Films. Micromachines, 9.10.3390/mi9100518 ↗
8. Wiatrowski, A., Obstarczyk, A., Mazur, M., Kaczmarek, D., and Wojcieszak, D. (2019). Characterization of HfO2 Optical Coatings Deposited by MF Magnetron Sputtering. Coatings, 9.10.3390/coatings9020106 ↗
9. Nanoindentation-induced deformation behaviors of tetrahedral amorphous carbon film deposited by cathodic vacuum arc with different substrate bias voltages10.1016/j.apsusc.2021.151741 ↗
10. Cheng, H.-P., Le, P.H., Tuyen, L.T.C., Jian, S.-R., Chung, Y.-C., Teng, I.-J., Lin, C.-M., and Juang, J.-Y. (2022). Effects of Substrate Temperature on Nanomechanical Properties of Pulsed Laser Deposited Bi2Te3 Films. Coatings, 12.10.3390/coatings12060871 ↗
11. Measuring plastic yield stress of magnetron sputtered aluminum thin film by nanoinden-tation10.1016/j.surfcoat.2014.11.030 ↗
12. Mechanical characterization of YBCO thin films using nanoindentation and finite element method10.3139/146.111533 ↗
13. Simulation of nanoindentation experiments of single-layer and double-layer thin films using finite element method10.1002/sia.5473 ↗
14. Evaluation of critical depth ratio for soft V2O5 film on hard Si substrate by finite element modeling of experimentally measured nanoindentation response10.1088/0022-3727/49/15/155302 ↗
15. Analysis on the cracking of thin hard films considering the effects of in-terfacial delamination10.1016/j.surfcoat.2020.126284 ↗
16. An inverse problem in estimating fracture toughness of TiAlN thin films by finite element method based on nanoindentation morphology10.1016/j.vacuum.2021.110458 ↗
17. Simulation of Berkovich nanoindentation experiments on thin films using finite element method10.1016/S0040-6090(97)00739-6 ↗
18. A review of nanoindentation continuous stiffness measurement technique and its applications10.1016/S1044-5803(02)00192-4 ↗
19. An improved technique for determining hardness and elastic modulus using load and dis-placement sensing indentation experiments10.1557/JMR.1992.1564 ↗
20. Determination of monotonic stress-strain curve of hard ma-terials from ultra-low-load indentation tests10.1016/S0020-7683(97)89371-7 ↗
21. Measuring Glassy and Viscoelastic Polymer Flow in Molecular-Scale Gaps Using a Flat Punch Mechanical Probe10.1021/nn700211g ↗
22. Theoretical Strength and the Onset of Plasticity in Bulk Metallic Glasses Investigated by Nanoindentation with a Spherical Indenter10.1103/PhysRevLett.93.125504 ↗
23. Accurate determination of the mechanical properties of thin aluminum films deposited on sapphire flats using nanoindentations10.1557/JMR.1999.0308 ↗
24. Determining elastic–plastic properties from indentation data obtained from finite element simulations and experimental results10.1016/j.ijmecsci.2012.05.011 ↗
25. Evaluation of elasto-plastic properties of ITO film using combined nanoindentation and finite element approach10.1016/j.ceramint.2015.09.054 ↗
26. Nanoindentation of sliver nanowires10.1021/nl034525b ↗
27. Quantifying the early stages of plasticity through nanoscale experiments and sim-ulations10.1103/PhysRevB.67.104105 ↗
28. Berkovich nanoindentation and deformation mechanisms in GaN thin films10.1016/j.apsusc.2007.08.022 ↗
29. Nanoscale elastic–plastic deformation and stress distributions of the C plane of sapphire single crystal during nanoindentation10.1016/j.jeurceramsoc.2011.04.012 ↗
30. Substrate effects on nanoindentation mechanical property measurement of soft films on hard substrates10.1557/JMR.1999.0042 ↗