journal article·2022-06-20Open access

Effects of Substrate Temperature on Nanomechanical Properties of Pulsed Laser Deposited Bi2Te3 Films

Hui-Ping Cheng, Phuoc Huu Le, Le Thi Cam Tuyen, Sheng-Rui Jian, Yu-Chen Chung, I-Ju Teng, Chih-Ming Lin, Jenh-Yih Juang

Coatings· Volume 12· Issue 6

Abstract

The correlations among microstructure, surface morphology, hardness, and elastic modulus of Bi2Te3 thin films deposited on c-plane sapphire substrates by pulsed laser deposition are investigated. X-ray diffraction (XRD) and transmission electron microscopy are used to characterize the microstructures of the Bi2Te3 thin films. The XRD analyses revealed that the Bi2Te3 thin films were highly (00l)-oriented and exhibited progressively improved crystallinity when the substrate temperature (TS) increased. The hardness and elastic modulus of the Bi2Te3 thin films determined by nanoindentation operated with the continuous contact stiffness measurement (CSM) mode are both substantially larger than those reported for bulk samples, albeit both decrease monotonically with increasing crystallite size and follow the Hall—Petch relation closely. Moreover, the Berkovich nanoindentation-induced crack exhibited trans-granular cracking behaviors for all films investigated. The fracture toughness was significantly higher for films deposited at the lower TS; meanwhile, the fracture energy was almost the same when the crystallite size was suppressed, which indicated a prominent role of grain boundary in governing the deformation characteristics of the present Bi2Te3 films.
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Research context

OpenAlex topics: Metal and Thin Film Mechanics · High-pressure geophysics and materials · Adhesion, Friction, and Surface Interactions

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Department of Materials Science and Engineering, I-Shou University, Kaohsiung 84001, Taiwan

Department of Physics and Biophysics, Faculty of Basic Sciences, Can Tho University of Medicine and Pharmacy, Can Tho City 94000, Vietnam

Department of Chemical Engineering, College of Engineering Technology, Can Tho University, 3/2 Street, Can Tho City 900000, Vietnam

Department of Fragrance and Cosmetic Science, College of Pharmacy, Kaohsiung Medical University, 100 Shi-Chuan 1st Road, Kaohsiung 80708, Taiwan

Department of Mechanical and Automation Engineering, I-Shou University, Kaohsiung 84001, Taiwan

College of Engineering, National Taiwan University of Science and Technology, Taipei 106335, Taiwan

Department of Physics, National Tsing Hua University, Hsinchu 30013, Taiwan

Department of Electrophysics, National Yang Ming Chiao Tung University, Hsinchu 30010, Taiwan

Funding

the Ministry of Science and Technology, Taiwan · ietnam National Foundation for Science and Technology Development (NAFOSTED)

References (40)

Show source-provided references
1. First-principles investigations of the atomic, electronic, and thermoelectric properties of equilibrium and strained Bi2Se3 and Bi2Te3 including van der Waals interactions10.1103/PhysRevB.86.184111 ↗
2. Rowe, D.M. (1995). CRC Handbook of Thermoelectrics, CRC Press Inc.
3. Perovskite-structured PbTiO3 thin films grown from a single-source precursor10.1021/ic302772b ↗
4. Fabrication of Ag–ZnO composite thin films for plasmonic enhanced water splitting10.1016/j.matchemphys.2020.123220 ↗
5. Liaqat, R., Mansoor, M.A., Iqbal, J., Jilani, A., Shakir, S., Kalam, A., and Wageh, S. (2021). Fabrication of metal (Cu and Cr) incorporated nickel oxide films for electrochemical oxidation of methanol. Crystals, 11.10.3390/cryst11111398 ↗
6. Thermoelectric properties of nanostructured bismuth–telluride thin films grown using pulsed laser deposition10.1016/j.jallcom.2014.07.018 ↗
7. Thermoelectric films and periodic structures and spin Seebeck effect systems: Facets of performance optimization10.1016/j.mtener.2022.100965 ↗
8. Polymer based thermoelectric nanocomposite materials and devices: Fabrication and characteristics10.1016/j.nanoen.2020.105186 ↗
9. Catalyst-free synthesis and structural and mechanical characterization of single crystalline Ca2B2O5·H2O nanobelts and stacking faulted Ca2B2O5 nanogrooves10.1021/nl9034187 ↗
10. Atomic-scale imaging correlation on the deformation and sensing mechanisms of SnO2 nanowire10.1063/1.4904912 ↗
11. Mechanical properties of hydrogenated amorphous silicon (a-Si:H) particles10.1063/1.5117282 ↗
12. Wiatrowski, A., Obstarczyk, A., Mazur, M., Kaczmarek, D., and Wojcieszak, D. (2019). Characterization of HfO2 optical coatings deposited by mf magnetron sputtering. Coatings, 9.10.3390/coatings9020106 ↗
13. Wang, S.H., Jian, S.R., Chen, G.J., Cheng, H.Z., and Juang, J.Y. (2019). Annealing-driven microstructural evolution and its effects on the surface and nanomechanical properties of Cu-doped NiO thin films. Coatings, 9.10.3390/coatings9020107 ↗
14. Mechanical and structural properties of Li-doped CuO thin films deposited by the successive ionic layer adsorption and reaction method10.1016/j.tsf.2020.137839 ↗
15. A review of nanoindentation continuous stiffness measurement technique and its applications10.1016/S1044-5803(02)00192-4 ↗
16. The relation between load and penetration in the axisymmetric boussinesq problem for a punch of arbitrary profile10.1016/0020-7225(65)90019-4 ↗
17. An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments10.1557/JMR.1992.1564 ↗
18. Experimental realization of a three-dimensional topological insulator, Bi2Te310.1126/science.1173034 ↗
19. Cullity, B.D., and Stock, S.R. (2001). Element of X-ray Diffraction, Prentice Hall.
20. Effect of oxidation temperature on physical and electrical properties of Sm2O3 thin-film gate oxide on Si substrate10.1007/s11664-016-4694-z ↗
21. X-ray peak broadening studies of nanocrystalline hydroxyapatite by Williamson–Hall analysis10.1016/j.physb.2010.07.020 ↗
22. Nanoindentation of single-crystal Bi2Te3 topological insulators grown with the Bridgman–Stockbarger method10.1002/pssb.201552760 ↗
23. Nanomechanical properties of Bi2Te3 thin films by nanoindentation10.1016/j.jallcom.2014.09.028 ↗
24. Tuyen, L.T.C., Jian, S.R., Tien, N.T., and Le, P.H. (2019). Nanomechanical and material properties of fluorine-doped tin oxide thin films prepared by ultrasonic spray pyrolysis: Effects of F-doping. Materials, 12.10.3390/ma12101665 ↗
25. Nanoindentation of Cu2O nanocubes10.1021/nl048941n ↗
26. Hwang, Y.M., Pan, C.T., Le, P.H., Uyen, N.N., Tuyen, L.T.C., Nguyen, V., Luo, C.W., Juang, J.Y., Leu, J., and Jian, S.R. (2020). Effects of stoichiometry on structural, morphological and nanomechanical properties of Bi2Se3 thin films deposited on InP(111) substrates by pulsed laser deposition. Coatings, 10.10.3390/coatings10100958 ↗
27. Plasticity in small-sized metallic systems: Intrinsic versus extrinsic size effect10.1016/j.pmatsci.2011.01.005 ↗
28. Cross-sectional transmission electron microscopy observations of structural damage in Al0.16Ga0.84N thin film under contact loading10.1063/1.2836939 ↗
29. Cathodoluminescence rosettes in c-plane GaN films under Berkovich nanoindentation10.1016/j.optmat.2013.08.011 ↗
30. Mechanical properties of the hexagonal HoMnO3 thin films by nanoindentation10.1016/j.jallcom.2010.08.109 ↗
31. Smolik, J., Kacprzyńska-Gołacka, J., Sowa, S., and Piasek, A. (2020). The analysis of resistance to brittle cracking of tungsten doped TiB2 coatings obtained by magnetron sputtering. Coatings, 10.10.3390/coatings10090807 ↗
32. Substitutional alloy of Bi and Te at high pressure10.1103/PhysRevLett.106.145501 ↗
33. Pressure-induced phase transition of Bi2Te3 to a bcc structure10.1103/PhysRevB.83.092102 ↗
34. High-pressure studies of topological insulators Bi2Se3, Bi2Te3, and Sb2Te310.1002/pssb.201200672 ↗
35. Transmission electron microscopy observation of deformation microstructure under spherical indentation in silicon10.1063/1.1332110 ↗
36. Nanoindentation-induced phase transformation in (1 1 0)-oriented Si single-crystals10.1016/j.cossms.2009.11.002 ↗
37. Johnson, K.L. (1985). Contact Mechanics, Cambridge University Press.10.1017/CBO9781139171731 ↗
38. Fracture toughness of carbides in tool steels evaluated by nanoindentation10.1016/j.actamat.2007.03.028 ↗
39. Fracture and Fatigue in Graphene Nanocomposites10.1002/smll.200901480 ↗
40. Thermoelectric properties of bismuth-selenide films with controlled morphology and texture grown using pulsed laser deposition10.1016/j.apsusc.2013.08.107 ↗