Cleaning Effect of Atmospheric-Plasma-Sprayed Y2O3 Coating Using Piranha Solution Based on Contamination Particle Measurement
Source abstract
Abstract
A Y2O3 coating was prepared using the atmospheric plasma spraying (APS) technique. On exposing the coating to CF4/O2/Ar plasma, a fluorine contamination layer (YOxFy) was formed, which was the main cause of process drift and contamination particle generation on the APS–Y2O3 coating surface. To remove the YOxFy layer on the coating surface, a piranha solution, which is a mixture of sulfuric acid and hydrogen peroxide, was employed for cleaning. The piranha solution was found to be an excellent medium for removing the YOxFy layer. The amount of contamination particle generated could be reduced by approximately 37% after cleaning with a 3:1 piranha solution compared with before cleaning.
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Research context
OpenAlex topics: Plasma Diagnostics and Applications · Metal and Thin Film Mechanics · Diamond and Carbon-based Materials Research
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Department of Advanced Materials Engineering, Daejeon University, Daejeon 34520, Republic of Korea
Vacuum Materials Measurement Team, Korea Research Institute of Standards and Science, Daejeon 34113, Republic of Korea
Department of Electrical Engineering, Hanyang University, Seoul 04763, Republic of Korea
Division of Nanoscience and Technology, University of Science and Technology, Daejeon 34113, Republic of Korea
Funding
Material parts technology development program of Ministry of Trade, Industry and Energy · Korea Research Institute of Standards and Science
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