Functional Performance of Silicon with Periodic Surface Structures Induced by Femtosecond Pulsed Laser
Source abstract
Abstract
A micro/nano surface structure can produce specific properties, such as super hydrophilicity, low reflectance property, etc. A femtosecond laser-induced periodic surface structure is an important manufacturing process for the micro/nano structure. This research investigated the effects of scanning intervals and laser power on the surface morphology, wetting properties, and reflectance properties of LIPSS based on a silicon wafer. The results showed that the laser power had a significant effect on the surface morphology and wettability of silicon. With the increase of laser power, the surface roughness, etching depth and surface hydrophilicity increased. However, the laser power had little effect on the surface reflectance. The scanning interval had a great influence on the wettability and reflectance property of silicon. With the decrease of the scanning interval, the surface hydrophobicity and reflectance of silicon first decrease and then remain basically stable from 10 μm.
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Research context
OpenAlex topics: Laser Material Processing Techniques · Surface Roughness and Optical Measurements · Laser-induced spectroscopy and plasma
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
School of Power and Mechanical Engineering, Wuhan University, Wuhan 430072, China
The Institute of Technological Sciences, Wuhan University, Wuhan 430072, China
Funding
National Key Research and Development Program of China
References (21)
Show source-provided references
1. Passivation of all-angle black surfaces for silicon solar cells10.1016/j.solmat.2016.10.044 ↗
2. Anti-reflection silicon with self-cleaning processed by femtosecond laser10.1016/j.optlastec.2020.106790 ↗
3. Light management with nanostructures for optoelectronic devices10.1021/jz500306f ↗
4. Porous electrode materials for lithium-ion batteries-how to prepare them and what makes them special10.1002/aenm.201200320 ↗
5. Bactericidal activity of black silicon10.1038/ncomms3838 ↗
6. Micromachining of the back surface and interior of Si using infrared femtosecond laser pulses10.2351/1.5123309 ↗
7. Making silicon hydrophobic: Wettability control by two-lengthscale simultaneous patterning with femtosecond laser irradiation10.1088/0957-4484/17/13/026 ↗
8. Direct creation of black silicon using femtosecond laser pulses10.1016/j.apsusc.2011.03.106 ↗
9. Guay, J.-M., Lesina, A.C., Baxter, J., Charron, M., Côté, G., Ramunno, L., Berini, P., and Weck, A. (2016). Enhanced plasmonic coloring of silver and formation of large laser-induced periodic surface structures using multi-burst picosecond pulses. arXiv.10.1364/CLEO_AT.2016.ATu4K.5 ↗
10. Controlled nanostructrures formation by ultra fast laser pulses for color marking10.1364/OE.18.002913 ↗
11. Dynamics of ripple formation on silicon surfaces by ultrashort laser pulses in subablation conditions10.1103/PhysRevB.86.115316 ↗
12. Femtosecond laser induced tunable surface transformations on (111) Si aided by square grids diffraction10.1063/1.4938244 ↗
13. Control of periodic surface structures on silicon by combined temporal and polarization shaping of femtosecond laser pulses10.1016/j.apsusc.2018.02.258 ↗
14. Wetting properties of LIPSS structured silicon surfaces10.1140/epjb/e2019-90672-2 ↗
15. Nivas, J.J., and Amoruso, S. (2021). Generation of supra-wavelength grooves in femtosecond laser surface structuring of silicon. Nanomaterials, 11.10.3390/nano11010174 ↗
16. Continuous modulations of femtosecond laser-induced periodic surface structures and scanned line-widths on silicon by polarization changes10.1364/OE.21.015505 ↗
17. Laser-induced periodic surface structures (LIPSS) on heavily boron-doped diamond for electrode applications10.1021/acsami.8b15951 ↗
18. Texturing metal surface with MHz ultra-short laser pulses10.1364/OE.25.018131 ↗
19. Understanding femtosecond laser internal scribing of diamond by atomic simulation: Phase transition, structure and property10.1016/j.carbon.2021.01.111 ↗
20. Femtosecond Laser Generated Hierarchical Macropore/LIPSS Metasurfaces and Their Ultrabroadband Absorbance, Photothermal Properties, and Thermal-Induced Reflectance Oscillation10.1021/acsaelm.1c01180 ↗
21. Formation of controllable 1D and 2D periodic surface structures on cobalt by femtosecond double pulse laser irradiation10.1063/1.5103216 ↗