Sandwich Structure to Enhance the Mechanical and Electrochemical Performance of TaN/(Ta/Ti)/TiN Multilayer Films Prepared by Multi-Arc Ion Plating
Source abstract
Abstract
TaN/(Ta/Ti)/TiN multilayer films at various target to substrate distances (dts), composed of hexagonal TaN, (t-Ta/fcc-Ti) and fcc-TiN with a sandwich structure, were prepared via multi-arc ion plating. With increasing dts, the deposition rate of the films first increased and then decreased, and the average grain size increased from 11.9 to 13.9 nm and then decreased to 10.4 nm. The TaN/(Ta/Ti)/TiN multilayer films have a high ratio of hardness to elastic modulus (H/E*) and H3/E*2 ratios, displaying an outstanding level of both hardness and toughness compared with Ta-related films. The nano-multilayer TaTi interlayers inhibited the columnar structure and prolonged the corrosion diffusion path by increasing stable interfaces. The TaN/(Ta/Ti)/TiN multilayer film at dts = 220 mm exhibited comprehensive properties, including a high hardness of 25 GPa, strong adhesion strength of 68 N, low coefficient of friction of 0.41, low wear rate of 2.7 × 10−6 mm3(mN)−1 and great corrosion resistance in 3.5 wt% NaCl solution, showing promising application as a protective coating.
Source: crossref · Quality: baseline
Research context
OpenAlex topics: Metal and Thin Film Mechanics · Diamond and Carbon-based Materials Research · Copper Interconnects and Reliability
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, 122 Luoshi Road, Wuhan 430070, China
Chaozhou Branch of Chemistry and Chemical Engineering Guangdong Laboratory, Chaozhou 521000, China
Advanced Engineering Technology Research Institute of Zhongshan City, Wuhan University of Technology, Zhongshan 528400, China
Hubei Key Laboratory of Advanced Technology for Automotive Components, Wuhan University of Technology, Wuhan 430070, China
Hubei Key Laboratory of Roadway Bridge and Structure Engineering, Wuhan University of Technology, 122 Luoshi Road, Wuhan 430070, China
Funding
Guangdong Major Project of Basic and Applied Basic Research · Key-Area Research and Development Program of Guangdong Province · Chaozhou Science and Technology Project · Self-innovation Research Funding Project of Hanjiang Laboratory · Major Science and Technology Project in Zhongshan City, Guangdong Province · Joint Fund of the Ministry of Education for Pre-research of Equipment · Science Challenge Project · National Natural Science Foundation of China · 111 Project · International Science and Technology Cooperation Program of China · Technological Innovation of Hubei Province, China
References (50)
Show source-provided references
1. Mechanical Properties of Ceramic Multilayers: TiN/CrN, TiN/ZrN, and TiN/TaN10.1016/S0254-0584(97)80256-8 ↗
2. Stability of Ti–B–N solid solutions and the formation of nc-TiN/a-BN nanocomposites studied by combined ab initio and thermodynamic calculations10.1016/j.actamat.2008.04.066 ↗
3. Tribological properties of nanostructured TiAlN/W2N multilayer coating produced by PVD10.1016/j.wear.2019.04.021 ↗
4. Plastic Deformation Behavior of Nanostructured CrN/AlN Multilayer Coatings Deposited by Hybrid dcMS/HPPMS10.1016/j.surfcoat.2017.06.092 ↗
5. Azizpour, A., Rainer, H., Klimashin, F.F., Wojcik, T., Poursaeidi, E., and Mayrhofer, P.H. (2019). Deformation and Cracking Mechanism in CrN/TiN Multilayer Coatings. Coatings, 9.10.3390/coatings9060363 ↗
6. Influence of Hardness on the wear resistance of 17-4 PH stainless steel evaluated by the pin-on-disc testing10.1016/j.jmatprotec.2007.11.251 ↗
7. Self-Assembly of TaC@Ta Core-Shell-Like Nanocomposite Film via Solid-State Dewetting: Toward Superior Wear and Corrosion Resistance10.1016/j.actamat.2018.08.055 ↗
8. Growth of single-crystal TiN/VN strained-layer superlattices with extremelyhigh mechanical hardness10.1063/1.339770 ↗
9. The production of large tensile stresses by dislocations10.1103/PhysRevB.2.547 ↗
10. Growth structure and microhardness of epitaxial TiN/NbN superlattices10.1557/JMR.1992.0901 ↗
11. Reactive unbalanced magnetron sputter deposition of polycrystalline TiN/NbN superlattice coatings10.1016/0257-8972(93)90331-H ↗
12. Superhard nanocrystalline composites: Present status of the research and possible industrial applications
13. Microstructure, adhesion and tribological properties of CrN/CrTiAlSiN/WCrTiAlN multilayer coatings deposited on nitrocarburized AISI 4140 steel10.1016/j.surfcoat.2019.01.091 ↗
14. Comparative study of CrAlSiN monolayer and CrN/AlSiN superlattice multilayer coatings: Behavior at high temperature in steam atmosphere10.1016/j.jallcom.2018.11.199 ↗
15. Experimental studies of the effect of Ti interlayers on the corrosion resistance of TiN PVD coatings by using electrochemical methods10.1016/j.corsci.2018.01.010 ↗
16. Mechanisms of growth, properties and degradation of amorphous carbon films by closed field unbalanced magnetron sputtering on stainless steel bipolar plates for PEMFCs10.1016/j.apsusc.2017.06.122 ↗
17. Thermal-chemical-mechanical gun bore erosion of an advanced artillery system part one: Theories and mechanisms10.1016/j.wear.2004.09.030 ↗
18. Characterization and Comparison of Magnetron Sputtered and Electroplated Gun Bore Coatings10.1115/1.2172963 ↗
19. High-rate sputter deposited tantalum coating on steel for wear and erosion mitigation10.1016/S0257-8972(01)01383-4 ↗
20. The β to α phase transition of tantalum coatings deposited by modulated pulsed power magnetron sputtering10.1016/j.surfcoat.2012.10.061 ↗
21. Microstructural evolution and mechanical properties of in situ nano Ta4HfC5 reinforced SiBCN composite ceramics10.1007/s40145-020-0410-9 ↗
22. Single-source-precursor synthesis and phase evolution of SiC-TaC-C ceramic nanocomposites containing core-shell structured TaC@C nanoparticles10.1007/s40145-020-0371-z ↗
23. Influence of MoSi2 on oxidation protective ability of TaB2-SiC coating in oxygen-containing environments within a broad temperature range10.1007/s40145-020-0406-5 ↗
24. Effect of duty cycles on the deposition and characteristics of high power impulse magnetron sputtering deposited TiN thin films10.1016/j.surfcoat.2014.03.011 ↗
25. Mechanical and tribological properties of multilayered PVD TiN/CrN, TiN/MoN, TiN/NbN and TiN/TaN coatings on cemented carbide10.1016/S0257-8972(98)00544-1 ↗
26. Secondary hardness enhancement in large period TiN/TaN superlattices10.1016/j.surfcoat.2014.05.030 ↗
27. Characteristics of TiN/W2N multilayers prepared using magnetron sputter deposition with dc and pulsed dc powers10.1016/j.surfcoat.2016.03.086 ↗
28. Increase of coating thickness on sharp edges, deposited by cathodic arc evaporation10.1016/j.surfcoat.2020.126691 ↗
29. Enhanced discharge and surface properties of TiSiCN coatings deposited by pulse-enhanced vacuum arc evaporation10.1016/j.surfcoat.2020.126413 ↗
30. Effects of multi-layer structure on microstructure, wear and erosion performance of the Cr/CrN films on Ti alloy substrate10.1016/j.apsusc.2019.04.008 ↗
31. Improved adhesion and erosion wear performance of CrSiN/Cr multi-layer coatings on Ti alloy by inserting ductile Cr layers10.1016/j.triboint.2020.106657 ↗
32. Microstructure evolution and corrosion resistance of multi interfaces Al-TiAlN nanocomposite films on AZ91D magnesium alloy10.1016/j.surfcoat.2018.09.019 ↗
33. Mean free path of molecules on molecular distillation10.1016/0923-0467(94)02857-7 ↗
34. The effects of pulse frequency and substrate bias to the mechanical properties of CrN coatings deposited by pulsed DC magnetron sputtering10.1016/j.tsf.2005.07.190 ↗
35. Tailoring residual stresses in CrNx films on alumina and silicon deposited by high-power impulse magnetron sputtering10.1016/j.surfcoat.2020.125990 ↗
36. Microstructure, mechanical and tribological performance of nanostructured TiAlTaN-(TiAlN/TaN)n coatings: Understanding the effect of quaternary/multilayer volume fraction10.1016/j.surfcoat.2019.07.086 ↗
37. On the S/W stoichiometry and triboperformance of WSxC(H) coatings deposited by magnetron sputtering10.1016/j.surfcoat.2018.04.040 ↗
38. Bipolar HiPIMS: The role of capacitive coupling in achieving ion bombardment during growth of dielectric thin films10.1016/j.surfcoat.2021.127152 ↗
39. Structure and physical-mechanical properties of nanostructured thin films10.1134/1.1583811 ↗
40. Assessment of ductile character in superhard Ta-C-N thin films10.1016/j.actamat.2019.08.015 ↗
41. Structure, phase evolution, and mechanical properties of DC, pulsed DC, and high power impulse magnetron sputtered Ta-N films10.1016/j.surfcoat.2018.05.003 ↗
42. Effect of sputter pressure on microstructure and properties of β-Ta thin films10.1016/j.actamat.2019.10.056 ↗
43. High temperatures tribological properties of Ta-Ag films deposited at various working pressures and sputtering powers10.1016/j.surfcoat.2018.05.066 ↗
44. Friction and wear properties of amorphous and nanocrystalline Ta-Ag films at elevated temperatures as function of working pressure10.1016/j.surfcoat.2018.08.058 ↗
45. Effect of boron concentration on the mechanical, tribological and corrosion properties of Ta–B–N films by reactive magnetron sputtering10.1016/j.ceramint.2019.06.192 ↗
46. Annealing studies and oxidation tests of a hybrid multilayer arrangement of cathodic arc evaporated Ti-Al-N and reactively sputtered Ta–Al–N coatings10.1016/j.surfcoat.2015.10.054 ↗
47. Tribological study of a mono and multilayer coating of TaZrN/TaZr produced by magnetron sputtering on AISI-316L stainless steel10.1016/j.triboint.2018.10.034 ↗
48. Ultrafine Ceramic Grains Embedded in Metallic Glass Matrix: Achieving Superior Wear Resistance via Increase in Both Hardness and Toughness10.1021/acsami.8b02338 ↗
49. Spinodal decomposition in the Ta-Mo-Al-N films activated by Mo incorporation: Toward enhanced hardness and toughness10.1016/j.ceramint.2018.08.189 ↗
50. Electrochemical corrosion behavior of composite coatings of sealed MAO film on magnesium alloy AZ91D10.1016/j.electacta.2005.08.026 ↗