journal article·2023-02-08Open access

Advances and Challenges in Pulsed Laser Deposition for Complex Material Applications

Liviu Duta, Ion N. Mihailescu

Coatings· Volume 13· Issue 2

Abstract

Various physical vapor deposition (PVD) techniques, such as molecular beam epitaxy, electron beam physical vapor deposition, pulsed laser deposition (PLD), arc discharge, magnetron sputtering and/or ion beam sputtering, are currently used for coating or growing thin films on solid substrates [...]
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Research context

OpenAlex topics: Semiconductor materials and devices · Diamond and Carbon-based Materials Research · Metal and Thin Film Mechanics

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

National Institute for Lasers, Plasma and Radiation Physics, 077125 Magurele, Romania

Funding

Romanian Ministry of Education and Research, CNCS-UEFISCDI · Romanian Ministry of Research, Innovation and Digitization · PCE 113/2021

References (24)

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