Optical Characterization of Gadolinium Fluoride Films Using Universal Dispersion Model

The optical characterization of gadolinium fluoride (GdF3) films is performed in a wide spectral range using heterogeneous data-processing methods (the ellipsometric and spectrophotometric measurements for five samples with thicknesses ranging from 20 to 600 nm are processed simultaneously). The main result of the characterization is the optical constants of GdF3 in the range from far infrared to vacuum ultraviolet, both in the form of a table and in the form of dispersion parameters of the universal dispersion model (UDM). Such reliable data in such a broad spectral range have not been published so far. The GdF3 films exhibit several defects related to the porous polycrystalline structure, namely, surface roughness and a refractive index profile, which complicate the optical characterization. The main complication arises from the volatile adsorbed components, which can partially fill the pores. The presented optical method is based on the application of the UDM for the description of the optical response of GdF3 films with partially filled pores. Using this dispersion model, it is possible to effectively separate the optical response of the host material from the response of the adsorbed components. Several recently published structural and dispersion models are used for optical characterization for the first time. For example, a model of inhomogeneous rough films based on Rayleigh–Rice theory or asymmetric peak approximation with a Voigt profile for the phonon spectra of polycrystalline materials.