Ohmic Contact of Pt/Au on Hydrogen-Terminated Single Crystal Diamond
Source abstract
Abstract
In this study, contact properties of platinum/gold (Pt/Au) on the surface of hydrogen-terminated single crystal diamond (H-SCD) were studied with several treatment conditions. The electrodes of Pt (20 nm)/Au (100 nm) were deposited on H-SCD surface by electron beam evaporation technique. Then, the specific contact resistance (ρc) of the as-fabricated sample was measured by the circular transmission line model, which showed good ohmic properties with the value of 5.65 × 10−4 Ω·cm2. To identify the thermal stability of Pt/Au/H-SCD, the sample was annealed in hydrogen ambient from 200 to 700 °C for 20 min at each temperature. As the temperature increased, ρc demonstrated better thermal stability. In addition, the barrier height was evaluated to be −0.67 ± 0.12 eV by X-ray photoelectron spectroscopy (XPS) technique.
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Research context
OpenAlex topics: Diamond and Carbon-based Materials Research · Force Microscopy Techniques and Applications · Semiconductor materials and devices
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Key Lab for physical Electronics and Devices, Ministry of Education, Xi’an Jiaotong University, Xi’an 710049, China
Institute of Wide Band Gap Semiconductors, School of Electronics and Information Engineering, Xi’an Jiaotong University, Xi’an 710049, China
Funding
National Natural Science Foundation of China · China Postdoctoral Science Foundation · National Key R&D Program of China
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