journal article·2023-03-16Open access

Direct Liquid Reactor-Injector of Nanoparticles: A Safer-by-Design Aerosol Injection for Nanocomposite Thin-Film Deposition Adapted to Various Plasma-Assisted Processes

Guillaume Carnide, Laura Cacot, Yohan Champouret, Vincent Pozsgay, Thomas Verdier, Adèle Girardeau, Marjorie Cavarroc, Andranik Sarkissian, Anne-Françoise Mingotaud, Constantin Vahlas, Myrtil Louise Kahn, Nicolas Naudé, Luc Stafford, Richard Clergereaux

Coatings· Volume 13· Issue 3

Abstract

The requirements of nanocomposite thin films, having non-aggregated nanoparticles homogeneously dispersed in the matrix, have been realized using a new method of Direct Liquid Reactor-Injector (DLRI) of nanoparticles. In this approach, unlike conventional aerosol-assisted plasma deposition, the nanoparticles are synthesized before their injection as an aerosol into plasma. In our experiments, we have used two different plasma reactors, namely an asymmetric low-pressure RF plasma reactor and a parallel plate dielectric barrier discharge at atmospheric pressure. Our results have shown that DLRI can be easily coupled with various plasma processes as this approach allows the deposition of high-quality multifunctional nanocomposite thin films, with embedded nanoparticles of less than 10 nm in diameter. Hence, DLRI coupled with plasma processes meets the specifications for the deposition of multifunctional coatings.
Source: crossref · Quality: baseline

Research context

OpenAlex topics: Electrohydrodynamics and Fluid Dynamics · Plasma Applications and Diagnostics · Surface Modification and Superhydrophobicity

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Laboratory on Plasma and Conversion of Energy (LAPLACE), University of Toulouse, 31062 Toulouse, France

Laboratory of Coordination Chemistry (LCC) of CNRS, University of Toulouse, 31077 Toulouse, France

Safran Tech, Materials and Processes Department, 78114 Magny-Les-Hameaux, France

Department of Physics, University of Montréal, Montreal, QC H2V 0B3, Canada

Plasmionique Inc., Varennes, QC J3X 1S2, Canada

Laboratory IMRCP, University of Toulouse, CNRS, UPS, 31062 Toulouse, France

CIRIMAT Institute, University of Toulouse, CNRS, INPT, BP-44362, 31030 Toulouse, France

Funding

Centre National de la Recherche Scientifique (CNRS) · STAE-RTRA foundation (Toulouse, France) · National Science and Engineering Research Council · MITI · CNRS, Université de Montréal and Université de Toulouse III—Paul Sabatier · International Research Network on Controlled Multifunctional Nanomaterials (IRN NMC)

References (57)

Show source-provided references
1. Polymer-nanoparticle composites: From synthesis to modern applications10.3390/ma3063468 ↗
2. Applications of hybrid organic–inorganic nanocomposites10.1039/b509097k ↗
3. Fabrication of cobalt-organic composite thin film via plasma-enhanced chemical vapor deposition for antibacterial applications10.1016/j.tsf.2008.10.063 ↗
4. Synthesis of diamond/β-SiC composite films by microwave plasma assisted chemical vapor deposition10.1063/1.108458 ↗
5. Silicon nanocrystals: Novel synthesis routes for photovoltaic applications10.1002/pssa.201200533 ↗
6. Generation of metal clusters containing from 2 to 500 atoms10.1103/PhysRevLett.45.821 ↗
7. Silver nanoparticles as a key feature of a plasma polymer composite layer in mitigation of charge injection into polyethylene under dc stress
8. Composite TiOx/hydrocarbon plasma polymer films prepared by magnetron sputtering of TiO2 and poly (propylene)10.1002/ppap.200700006 ↗
9. Enhancing composition control of alloy nanoparticles from gas aggregation source by in operando optical emission spectroscopy10.1002/ppap.202000208 ↗
10. Carbon Nanoparticle/Hydrogenated Amorphous Carbon Composite Thin Films Formed in ECR Plasma10.1002/ppap.201000151 ↗
11. Palumbo, F., Porto, C.L., Fracassi, F., and Favia, P. (2020). Recent advancements in the use of aerosol-assisted atmospheric pressure plasma deposition. Coatings, 10.10.3390/coatings10050440 ↗
12. Hybrid approaches coupling sol–gel and plasma for the deposition of oxide-based nanocomposite thin films: A review10.1007/s42452-021-04642-0 ↗
13. Photocatalytic TiO2 thin films synthesized by the post-discharge of an RF atmospheric plasma torch10.1016/j.surfcoat.2016.01.049 ↗
14. PECVD Synthesis of Polysiloxane-Like Thin Films with Very Low Contact Angle Hysteresis10.1002/ppap.200731902 ↗
15. Deposition of homogeneous carbon-TiO2 composites by atmospheric pressure DBD10.1002/ppap.201600075 ↗
16. Nebulization of nanocolloidal suspensions for the growth of nanocomposite coatings in dielectric barrier discharges10.1002/ppap.201500223 ↗
17. Aerosol assisted atmospheric pressure plasma jet for a high deposition rate of silica-like thin films10.1051/epjap/2022210291 ↗
18. Kinetics driving thin-film deposition in dielectric barrier discharges using a direct liquid injector operated in a pulsed regime10.1088/1361-6463/ac94de ↗
19. Aerosol assisted chemical vapor deposition using nanoparticle precursors: A route to nanocomposite thin films10.1021/ja055563v ↗
20. One-step synthesis of metallic and metal oxide nanoparticles using amino-PEG oligomers as multi-purpose ligands: Size and shape control, and quasi-universal solvent dispersibility10.1039/C0CC02615H ↗
21. Influence of organic ligands on the stabilization of palladium nanoparticles10.1016/j.jorganchem.2004.09.006 ↗
22. Green chemistry: Principles and practice10.1039/B918763B ↗
23. Atom economy—A challenge for organic synthesis: Homogeneous catalysis leads the way10.1002/anie.199502591 ↗
24. Drying kinetics and particle formation from dilute colloidal suspensions in aerosol droplets10.1021/acs.langmuir.0c01830 ↗
25. The direct injection of liquid droplets into low pressure plasmas10.1116/1.3081965 ↗
26. Review on water electro-sprays and applications of charged drops with focus on the corona-assisted cone-jet mode for High Efficiency Air Filtration by wet electro-scrubbing of aerosols10.1016/j.jaerosci.2018.04.005 ↗
27. Viscous droplet in nonthermal plasma: Instability, fingering process, and droplet fragmentation10.1103/PhysRevE.101.063201 ↗
28. Electrostatic breakup in a misty plasma10.1103/PhysRevLett.104.065003 ↗
29. Charging and heating processes of dust particles in an electron cyclotron resonance plasma10.1088/1361-6595/ab1cac ↗
30. Point-to-plane discharge dynamics in the presence of dielectric droplets10.1088/0022-3727/36/10/309 ↗
31. Multi-scale investigation in the frequency domain of Ar/HMDSO dusty plasma with pulsed injection of HMDSO10.1088/1361-6595/ab07cc ↗
32. Kinetics driving nanocomposite thin film deposition in misty plasma processes10.1088/1361-6463/ac9ac2 ↗
33. Stancampiano, A., Gallingani, T., Gherardi, M., Machala, Z., Maguire, P., Colombo, V., Pouvesle, J., and Robert, E. (2019). Plasma and aerosols: Challenges, opportunities and perspectives. Appl. Sci., 9.10.3390/app9183861 ↗
34. Time-resolved analysis of the precursor fragmentation kinetics in an hybrid PVD/PECVD dusty plasma with pulsed injection of HMDSO10.1002/ppap.201900044 ↗
35. Plasma deposition of carbon layer: Correlations between plasma parameters, film structure and properties10.1016/j.diamond.2005.10.028 ↗
36. Soft polymerization of hexamethyldisiloxane by coupling pulsed direct-liquid injections with dielectric barrier discharge10.1002/ppap.202200165 ↗
37. Energy conversion efficiency in low-and atmospheric-pressure plasma polymerization processes with hydrocarbons10.1039/C9CP01567A ↗
38. Kraegeloh, A., Suarez-Merino, B., Sluijters, T., and Micheletti, C. (2018). Implementation of safe-by-design for nanomaterial development and safe innovation: Why we need a comprehensive approach. Nanomaterials, 8.10.3390/nano8040239 ↗
39. Secured Nanosynthesis–Deposition Aerosol Process for Composite Thin Films Incorporating Highly Dispersed Nanoparticles10.1002/advs.202204929 ↗
40. Role of substrate outgassing on the formation dynamics of either hydrophilic or hydrophobic wood surfaces in atmospheric-pressure, organosilicon plasmas10.1016/j.surfcoat.2013.05.045 ↗
41. Electrical model and analysis of the transition from an atmospheric pressure Townsend discharge to a filamentary discharge10.1088/0022-3727/38/4/004 ↗
42. Ellipsometry and Raman study on hydrogenated amorphous carbon (a-C:H) films deposited in a dual ECR-rf plasma10.1016/S0040-6090(99)00298-9 ↗
43. The use of refractive index as a measure of diamond-like carbon film quality10.1016/S0925-9635(97)00233-1 ↗
44. Infrared absorption properties of amorphous carbon films
45. Simonnet, C., Parmar, D., Zavvou, Z., Aussonne, A., Girardot, A., Pozsgay, V., Verdier, T., Carnide, G., Kahn, M., and Stafford, L. (2023). Pulsed-aerosol-assisted low-pressure plasma deposition of diamond-like carbon coatings. J. Vac. Sci. Technol. A Vac. Surf. Film., submitted.
46. Optical emission spectroscopy for diagnostic and monitoring of CH4 plasmas used for a-C:H deposition10.1088/0022-3727/23/7/008 ↗
47. Comparative experimental analysis of the a-C:H deposition processes using CH4 and C2H2 as precursors10.1063/1.2777643 ↗
48. Some Aspects of Reactive Complex Plasmas10.1002/ctpp.200910016 ↗
49. Formation of dust in low-pressure magnetized hydrocarbon plasmas10.1088/1367-2630/13/6/063006 ↗
50. Sadek, T., Vinchon, P., Durocher-Jean, A., Carnide, G., Kahn, M., Clergereaux, R., and Stafford, L. (2022). Time-resolved analysis of the electron temperature in RF magnetron discharges with a pulsed gas injection. Atoms, 10.10.3390/atoms10040147 ↗
51. Room-Temperature Organometallic Synthesis of Soluble and Crystalline ZnO Nanoparticles of Controlled Size and Shape10.1002/anie.200351949 ↗
52. Atmospheric pressure PE-CVD of silicon based coatings using a glow dielectric barrier discharge10.1016/j.surfcoat.2003.08.008 ↗
53. Optical properties of zinc oxide nanoparticles and nanorods synthesized using an organometallic method10.1002/cphc.200600184 ↗
54. Effect of C2H4/N2 ratio in an atmospheric pressure dielectric barrier discharge on the plasma deposition of hydrogenated amorphous carbon-nitride films (a-C:N:H)10.1007/s11090-010-9214-y ↗
55. Atmospheric pressure low temperature direct plasma technology: Status and challenges for thin film deposition10.1002/ppap.201200029 ↗
56. Refined analysis of current–voltage characteristics in Townsend dielectric barrier discharges in nitrogen at atmospheric pressure
57. Electrical model of an atmospheric pressure Townsend-like discharge (APTD)10.1051/epjap:2004197 ↗