Modeling of Poly(methylmethacrylate) Viscous Thin Films by Spin-Coating
Source abstract
Abstract
A predictive film thickness model based on an accepted equation of state is applied to the spin-coating of sub-micron poly(methylmethacrylate) viscous thin films from toluene. Concentration effects on density and dynamic viscosity of the spin-coating solution are closely examined. The film thickness model is calibrated with a system-specific film drying rate and was observed to scale with the square root of spin speed. Process mapping is used to generate a three-dimensional design space for the control of film thickness.
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Research context
OpenAlex topics: Fluid Dynamics and Thin Films · Block Copolymer Self-Assembly · Rheology and Fluid Dynamics Studies
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Department of Chemistry, University of Rhode Island, Kingston, RI 02881, USA
Funding
U.S. Department of Homeland Security · Rhodes Pharmaceuticals, L.P.
References (30)
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