Design and Preparation of a 6-Channel Fan-Shaped Integrated Narrow-Band Filter in the Mid-Infrared Band
Source abstract
Abstract
A six-channel fan-shaped integrated narrow-band filter on a silicon substrate was designed on the basis of the Fabray–Perot (FP) theory and was fabricated using e-beam thermal evaporation. The central wavelength was modulated by modifying the FP cavity thickness using the combination mask method. Germanium and zinc sulfide were selected as the high and low refractive index film materials, respectively. Its average peak transmission reached 83.3%, the cut-off transmittance was less than 1%, and the full width at half maximum (FWHM) changed from 55 and 94 nm, and the central wavelength positioning accuracy error was less than 0.35%. Furthermore, transmittance was also calculated inversely, using the thickness of each layer of films, in order to deduce the reason of the decrease in peak transmittance. Thickness deviation of each layer and interface scattering contributed to the decrease of peak transmittance. Compared with the same type of products in the market, our filter showed better properties than that of some published and commercial filter.
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Research context
OpenAlex topics: Photonic and Optical Devices · Optical Coatings and Gratings · Photonic Crystals and Applications
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Institute of Optoelectronic Engineering, Xi’an Technological University, No.2 Xuefu Middle Road, Xi’an 710021, China
Key Laboratory of Optical Measurement and Thin Film of Shaanxi Province, Xi’an Technological University, No.2 Xuefu Middle Road, Xi’an 710021, China
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