Mechanical Properties and Residual Stress Measurement of TiN/Ti Duplex Coating Using HiPIMS TiN on Cold Spray Ti
Source abstract
Abstract
This study investigated the mechanical properties and the residual stress of high-power impulse magnetron sputtering (HiPIMS) titanium nitride (TiN) thin film capping on cold spray titanium (Ti) coating. This TiN/Ti duplex coating was deposited on the Ti substrate, and the cold spray titanium (Ti) coating was prepared in three cases with different numbers of layers. The study determined Young’s modulus, hardness, and roughness of TiN thin film and cold spray Ti coatings by nano-indentation and AFM. The residual stress measurement of TiN/Ti duplex coating was conducted using the ring-core drilling method. A focused ion beam (FIB) drilled the TiN/Ti duplex coating with various milling depth steps. The corresponding images were obtained with a scanning electron microscope (SEM). The relationship between surface deformations and relaxation stress after each milling depth step was obtained using the digital image correlation (DIC) method. The results showed TiN/Ti duplex coating exhibited excellent mechanical properties, and the residual stresses were not significantly changing with different Ti cold spray substrates, showing the feasibility of coating technology for the future applications in the aerospace industry.
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Research context
OpenAlex topics: Metal and Thin Film Mechanics · High-Temperature Coating Behaviors · Diamond and Carbon-based Materials Research
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Graduate Institute of Precision Engineering, National Chung Hsing University, Taichung 40749, Taiwan
Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu Science Park, Hsinchu 300096, Taiwan
Department of Mining and Materials Engineering, McGill University, Montreal, QC H3A 0C5, Canada
Department of Mechanical Engineering, National Cheng Kung University, Tainan 70101, Taiwan
iCenter for Advanced Science Technology, National Chung Hsing University, Taichung 402, Taiwan
Funding
Ministry of Science and Technology, Taiwan
References (32)
Show source-provided references
1. Tribological behavior of TiN and Ti (Si,C)N coatings on cold sprayed Ti substrates10.1016/j.surfcoat.2016.02.044 ↗
2. Numerical modelling of particle impact and residual stresses in cold sprayed coatings: A review10.1016/j.surfcoat.2021.126835 ↗
3. Cold Spray Deposition of Ni and WC-Reinforced Ni Matrix Composite Coatings10.1007/s11666-017-0636-4 ↗
4. Microstructure and bonding mechanisms in cold spray coatings10.1080/02670836.2018.1475444 ↗
5. Influence of helium and nitrogen gases on the properties of cold gas dynamic sprayed pure titanium coatings10.1007/s11666-010-9568-y ↗
6. A novel pulsed magnetron sputter technique utilizing very high target power densities10.1016/S0257-8972(99)00292-3 ↗
7. Influence of high power densities on the composition of pulsed magnetron plasmas10.1016/S0042-207X(01)00475-4 ↗
8. Ionized physical vapor deposition (IPVD): A review of technology and applications10.1016/j.tsf.2006.03.033 ↗
9. Investigation of ionized metal flux fraction in HiPIMS discharges with Ti and Ni targets10.1016/j.surfcoat.2013.10.064 ↗
10. Steady state discharge optimization in high-power impulse magnetron sputtering through the control of the magnetic field10.1063/1.3673871 ↗
11. Pulse management in high power pulsed magnetron sputtering of niobium10.1016/j.surfcoat.2012.04.019 ↗
12. Comparison of microstructure and mechanical properties of chromium nitride-based coatings deposited by high power impulse magnetron sputtering and by the combined steered cathodic arc/unbalanced magnetron technique10.1016/j.tsf.2003.11.113 ↗
13. High-flux low-energy (≂20 eV) N+ 2 ion irradiation during TiN deposition by reactive magnetron sputtering: Effects on microstructure and preferred orientation10.1063/1.359720 ↗
14. A study of the phase transformation of low temperature deposited tantalum thin films using high power impulse magnetron sputtering and pulsed DC magnetron sputtering10.1016/j.surfcoat.2022.128288 ↗
15. Chen, T.Y.-F., Chou, Y.-C., Wang, Z.-Y., Lin, W.-Y., and Lin, M.-T. (2020). Using Digital Image Correlation on SEM Images of Strain Field after Ion Beam Milling for the Residual Stress Measurement of Thin Films. Materials, 13.10.3390/ma13061291 ↗
16. Depth-resolved residual stress analysis of thin coatings by a new FIB–DIC method10.1016/j.msea.2011.07.001 ↗
17. Focused ion beam ring drilling for residual stress evaluation10.1016/j.matlet.2009.06.020 ↗
18. Nanoscale residual stress depth profiling by Focused Ion Beam milling and eigenstrain analysis10.1016/j.matdes.2018.02.044 ↗
19. Residual stress evaluation at the micrometer scale: Analysis of thin coatings by FIB milling and digital image correlation10.1016/j.surfcoat.2010.09.033 ↗
20. (2022, April 09). ASTM International, ASTM B265-20a. Available online: https://www.astm.org/b0265-20a.html.
21. Characterization of Ti cold spray coatings by indentation methods10.1016/j.actaastro.2011.06.012 ↗
22. Mechanical behavior of Ti cold spray coatings determined by a multi-scale indentation method10.1016/j.msea.2011.09.083 ↗
23. Microstructure and Mechanical Properties of Ti Cold-Spray Splats Determined by Electron Channeling Contrast Imaging and Nanoindentation Mapping10.1017/S1431927615000240 ↗
24. Influence of Substrate Negative Bias on Structure and Properties of TiN Coatings Prepared by Hybrid HIPIMS Method10.1016/j.jmst.2014.06.002 ↗
25. Microstructural and electrochemical comparison between TiN coatings deposited through HIPIMS and DCMS techniques10.1016/j.jallcom.2017.11.162 ↗
26. Measurement of residual stress on TiN/Ti bilayer thin films using average X-ray strain combined with laser curvature and nanoindentation methods10.1016/j.matchemphys.2017.06.042 ↗
27. (2022, April 09). ASTM International, ASTM E837-08. Available online: https://www.astm.org/e0837-08.html.
28. Digital image correlation of SEM images for surface deformation of CMOS IC10.1016/j.mee.2018.09.007 ↗
29. Chen, T.Y.-F., Dang, N.M., Wang, Z.-Y., Chang, L.-W., Ku, W.-Y., Lo, Y.-L., and Lin, M.-T. (2021). Use of Digital Image Correlation Method to Measure Bio-Tissue Deformation. Coatings, 11.10.3390/coatings11080924 ↗
30. Number of Passes and Thickness Effect on Mechanical Characteristics of Cold Spray Coating10.1016/j.proeng.2014.06.296 ↗
31. Residual stress development in cold sprayed Al, Cu and Ti coatings10.1016/j.actamat.2013.06.033 ↗
32. Residual Stress Buildup in Ti Components Produced by Cold Spray Additive Manufacturing (CSAM)10.1007/s11666-020-01048-z ↗