Incidence Angle Effects on the Fabrication of Microstructures Using Six-Beam Laser Interference Lithography
Source abstract
Abstract
This paper presents a theoretical demonstration of diverse microstructure fabrication by changing the angle of incidence of a six-beam laser interference lithography system. Different combinations are formed with transverse electric (TE) and transverse magnetic (TM) polarizations and various microstructures are simulated by controlling the high-reflectivity mirror group to adjust the incidence angle. This study indicates that the incidence angle has a considerable influence on the shape and period of the lattice, thereby contributing to the fabrication of microstructures with different arrangements. These structures include donut, circle, D-type, rectangular, triangular, U-type, and honeycomb lattices. The six-beam laser interference lithography technique is expected to benefit microstructure fabrication because of its simple operation, large writing area, and low cost, thereby promoting the development of micro-optics.
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Research context
OpenAlex topics: Photonic and Optical Devices · Optical Coatings and Gratings · Photonic Crystals and Applications
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
School of Science, Lanzhou University of Technology, Lanzhou 730050, China
College of Physics and Electronic Engineering, Northwest Normal University, Lanzhou 730070, China
Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou 730000, China
Funding
National Natural Science Foundation of China
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