Strategies of Broadband Monitoring Aimed at Minimizing Deposition Errors
Source abstract
Abstract
This article presents a computational approach for comparing various broadband monitoring strategies, taking into account the positive and negative effects associated with the correlation of thickness errors caused by the monitoring procedure. The approach is based on statistical estimates of the strength of the error self-compensation effect and the expected level of thickness errors. Its application is demonstrated by using a 50-layer, nonpolarizing edge filter. The presented approach is general and can be applied to verify the prospects of broadband monitoring for the production of various types of optical coatings.
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Research context
OpenAlex topics: Optical Coatings and Gratings · Surface Roughness and Optical Measurements · Advanced Measurement and Metrology Techniques
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Research Computing Center, Lomonosov Moscow State University, Leninskiye Gory, Moscow 119992, Russia
Lomonosov Moscow State University, Faculty of Physics, Leninskiye Gory, Moscow 119991, Russia
Funding
Russian Science Foundation
References (25)
Show source-provided references
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