Influence of ALD Coating Layers on the Optical Properties of Nanoporous Alumina-Based Structures
Source abstract
Abstract
Optical changes associated with the surface coating of different metal oxides and nanolayers by the ALD technique of a nanoporous alumina structure (NPAS) obtained by the two-step anodization method were analyzed. The NPASs were coated with: (i) a single layer (SiO2 or TiO2), and (ii) a double layer of SiO2 plus Al2O3 or aluminum doped ZnO (AZO) to estimate the effect of surface layer coverage material, geometrical parameters (pore-size/porosity), and number of layers on light transmission/reflection. Chemical surface characterization of the different NPASs was carried out by analyzing XPS spectra, which allowed us to obtain an estimation of the coating layer homogeneity. Transmittance and spectroscopic ellipsometry measurements were analyzed in order to detect changes in characteristic optical parameters such as band gap, refractive index, and extinction coefficients associated with the material and the characteristics of the single or double coating layers.
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Research context
OpenAlex topics: Anodic Oxide Films and Nanostructures · Semiconductor materials and devices · Optical Coatings and Gratings
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Unidad de Nanotecnología, SCBI Centro, Universidad de Málaga, E-29071 Málaga, Spain
Servicios Centrales de Investigación, Universidad de Málaga, E-29071 Málaga, Spain
Laboratorio de Membranas Nanoporosas, Servicios Científico-Técnicos, Universidad de Oviedo, E-33006 Oviedo, Spain
Departmento de Física, Facultad de Ciencias, Universidad de Oviedo, E-33007 Oviedo, Spain
Departmento de Física Aplicada I, Facultad de Ciencias, Universidad de Málaga, E-29071 Málaga, Spain
Funding
Ministerio de Economía y Competitividad
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