Microstructure and Properties of CrAlSiN Coatings Deposited by HiPIMS and Direct-Current Magnetron Sputtering
Source abstract
Abstract
Four CrAlSiN coatings with different Al contents were prepared by varying Al sputtering power using a combined method of high power impulse magnetron sputtering (HiPIMS) and direct current magnetron sputtering (DCMS). Microstructure, chemical compositions and mechanical properties of the four coatings were characterized by XRD, XPS, SEM, TEM, nano-indentation etc. Results showed that the four coatings possessed face-centered cubic (fcc) CrN phase with Al and part of Si dissolved in it. Another part of Si existed as amorphous phase in the coatings. All the four coatings had columnar structure and formed in epitaxy growth by template effect. With increasing Al sputtering power, the Al content increased from 11.4 to 17.6 at.% gradually, while the Cr content decreased a little. The hardness of the CrAlSiN coatings increased initially probably due to the refinement of the coating grain size, while it decreased afterwards mainly caused by the aggregation of small particles leading to rougher surface and defects formed in the coatings. The elastic modulus and adhesive strength possessed the same variation tendency as the hardness versus Al sputtering power. The CrAlSiN coating with Al sputtering power of about 0.8 kW had the highest hardness of about 26.7 GPa and adhesive strength of about 27.2 N.
Source: crossref · Quality: baseline
Research context
OpenAlex topics: Metal and Thin Film Mechanics · Diamond and Carbon-based Materials Research · Boron and Carbon Nanomaterials Research
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Tianjin Key Laboratory of High Speed Cutting and Precision Machining, Tianjin University of Technology and Education, Tianjin 300222, China
National-Local Joint Engineering Laboratory of Intelligent Manufacturing Oriented Automobile Die & Mould, Tianjin University of Technology and Education, Tianjin 300222, China
Funding
National Nature Science Foundation of China · Tianjin Major Science and Technology Project of Military-Civil Integration · Research Development Foundation of Tianjin University of Technology and Education · Innovation Team Training Plan of Tianjin Universities and colleges
References (31)
Show source-provided references
1. Effect of nitrogen flow on the properties of quaternary CrAlSiN coatings at elevated temperatures10.1016/j.surfcoat.2007.06.042 ↗
2. Effect of cathode arc current and bias voltage on the mechanical properties of CrAlSiN thin films10.1016/j.surfcoat.2008.06.019 ↗
3. Influence of Al content on the microstructure and properties of the CrAlN coatings deposited by arc ion plating10.1007/s40195-017-0656-6 ↗
4. A superhard CrAlSiN superlattice coating deposited by a multi-arc ion plating: II. Thermal stability and oxidation resistance10.1016/j.surfcoat.2012.05.143 ↗
5. Wear behavior and cutting performance of CrAlSiN and TiAlSiN hard coatings on cemented carbide cutting tools for Ti alloys10.1016/j.surfcoat.2014.02.015 ↗
6. Thermal stability and oxidation behavior of AlTiN, AlCrN and AlCrSiWN coatings10.1016/j.ijrmhm.2013.11.018 ↗
7. Synthesis and properties of Cr–Al–Si–N films deposited by hybrid coating system with high power impulse magnetron sputtering (HIPIMS) and DC pulse sputtering10.1016/S1003-6326(12)61795-6 ↗
8. Duplex coating technique to improve the adhesion and tribological properties of CrAlSiN nanocomposite coating10.1016/j.surfcoat.2016.11.032 ↗
9. Development of Si-modified CrAlSiN nanocomposite coating for anti-wear application in extreme environment10.1016/j.surfcoat.2015.06.090 ↗
10. Li, B., Wang, T., Ding, J., Cai, Y., Shi, J., and Zhang, X. (2018). Influence of N2/Ar flow ratio on microstructure and properties of the AlCrSiN coatings deposited by high-power impulse magnetron sputtering. Coatings, 8.10.3390/coatings8010003 ↗
11. An introduction to thin film processing using high-power impulse magnetron sputtering10.1557/jmr.2012.8 ↗
12. Effect of substrate bias on microstructure and mechanical properties of WC-DLC coatings deposited by HiPIMS10.1016/j.surfcoat.2018.07.088 ↗
13. High power pulsed magnetron sputtering: A review on scientific and engineering state of the art10.1016/j.surfcoat.2009.11.013 ↗
14. Hybrid high power impulse and radio frequency magnetron sputtering system for TiCrSiN thin film depositions: Plasma characteristics and film properties10.1016/j.surfcoat.2018.04.072 ↗
15. Synthesis of pseudobinary Cr–Al–N films with B1 structure by rf-assisted magnetron sputtering method10.1016/S0257-8972(97)00391-5 ↗
16. Synthesis and mechanical properties of Cr–Si–N coatings deposited by a hybrid system of arc ion plating and sputtering techniques10.1016/j.surfcoat.2004.08.045 ↗
17. Microstructural control of Cr–Si–N films by a hybrid arc ion plating and magnetron sputtering process10.1016/j.actamat.2009.07.001 ↗
18. Structural, mechanical and tribocorrosion behaviour in artificial seawater of CrN/AlN nano-multilayer coatings on F690 steel substrates10.1016/j.apsusc.2017.09.166 ↗
19. Oxidation resistance of nanocomposite CrAlSiN under long-time heat treatment10.1016/j.surfcoat.2011.06.009 ↗
20. Preferred orientation of TiN films studied by a real time synchrotron X-ray scattering10.1063/1.364394 ↗
21. Interfacial structure, mechanical properties and thermal stability of CrAlSiN/CrAlN multilayer coatings10.1016/j.matchar.2017.01.010 ↗
22. Concepts for the design of advanced nanoscale PVD multilayer protective thin films10.1016/j.jallcom.2008.08.133 ↗
23. Structure and properties of CrAlSiN nanocomposite coatings deposited by lateral rotating cathod arc10.1016/j.tsf.2010.10.022 ↗
24. A superhard CrAlSiN superlattice coating deposited by multi-arc ion plating: I. Microstructure and mechanical properties10.1016/j.surfcoat.2012.05.144 ↗
25. Influence of Si contents on tribological characteristics of CrAlSiN nanocomposite coatings10.1016/j.tsf.2015.02.022 ↗
26. Two-phase single layer Al–O–N nanocomposite films with enhanced resistance to cracking10.1016/j.surfcoat.2012.04.028 ↗
27. Microstructure and properties of AlB2-type WB2 thin films deposited by direct-current magnetron sputtering10.1016/j.surfcoat.2014.02.049 ↗
28. Phase segregation and its effect on the adhesion of Cr–Al–N coatings on K38G alloy prepared by magnetron sputtering method10.1016/j.surfcoat.2007.02.044 ↗
29. Adhesion evaluation of thin ceramic coatings on tool steel using the scratch testing technique10.1016/0257-8972(94)02396-4 ↗
30. Design of AlCrSiN multilayers and nanocomposite coating for HSS cutting tools10.1016/j.apsusc.2015.05.191 ↗
31. Designing superhard, self-toughening CrAlN coatings through grain boundary engineering10.1016/j.actamat.2012.06.049 ↗