Effect of Magnetron Sputtering Deposition Conditions on the Mechanical and Tribological Properties of Wear-Resistant Titanium Carbonitride Coatings
Source abstract
Abstract
In the present work, the titanium carbonitride coatings were deposited by the reactive magnetron sputtering method at different substrate bias: 0, −70 V, and −100 V. The effect of the substrate bias on the structure, composition, and mechanical and tribological properties of titanium carbonitride coatings was studied. Scanning electron microscopy, nanoindentation, sliding wear test (ball-on-disk method), X-ray phase, and elemental analysis methods were used to evaluate the tribological properties and microstructure of the thin coatings. The dependencies obtained resulted in the determination of the most preferred mode of deposition by magnetron sputtering at a negative substrate bias in an atmosphere of argon–acetylene–nitrogen.
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Research context
OpenAlex topics: Metal and Thin Film Mechanics · Diamond and Carbon-based Materials Research · Advanced materials and composites
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
The Institute of Metallurgy and Ore Beneficiation, Satbayev University, Almaty 050013, Kazakhstan
Faculty of Mechanical Engineering, Wroclaw University of Science and Technology, 50-370 Wroclaw, Poland
Funding
Ministry of Education and Science of the Republic of Kazakhstan
References (35)
Show source-provided references
1. The microstructure and wear resistance of microarc oxidation composite coatings containing nano-hexagonal boron nitride (HBN) particles10.1007/s11665-017-2582-1 ↗
2. Physical and mechanical properties investigation of oxide coatings on titanium
3. Plasma electrolytic oxidation technology for producing protective coatings of aluminum alloys
4. Microstructure and mechanical properties of Ti(C,N) and TiN/Ti(C,N) multilayer PVD coatings10.1016/j.ijrmhm.2007.10.003 ↗
5. Synthesis, characterization and evaluation of titanium carbonitride surface layers with varying concentrations of carbon and nitrogen10.1016/j.ceramint.2011.10.075 ↗
6. Properties and performance of commercial TiCN coatings. Part 2: Tribological performance10.1016/S0257-8972(02)00651-5 ↗
7. Microstructure and mechanical properties of TiN/TiCN/TiC multilayer thin films deposited by magnetron sputtering
8. Microstructure, mechanical and tribological properties of TiCN nanocomposite films deposited by DC magnetron sputtering10.1016/j.surfcoat.2011.05.034 ↗
9. Influence of substrate bias on the structure and properties of TiCN films deposited by radio-frequency magnetron sputtering10.1016/j.tsf.2016.08.047 ↗
10. Structural characterization and adhesion appraisal of TiN and TiCN coatings deposited by CAE-PVD technique on a new carbide composite cutting tool10.1080/01694243.2015.1075857 ↗
11. Oxidation Behavior of Titanium Carbonitride Coating Deposited by Atmospheric Plasma Spray Synthesis10.1007/s11666-017-0620-z ↗
12. Synthesizing, microstructure and microhardness distribution of Ti−Si−C−N/TiCN composite coating on Ti−6Al−4V by laser cladding10.1016/j.surfcoat.2012.12.038 ↗
13. Phase constituents and mechanical properties of laser in-situ synthesized TiCN/TiN composite coating on Ti-6Al-4V10.1016/j.surfcoat.2010.07.058 ↗
14. Microstructure and corrosion behavior of TiC/Ti(CN)/TiN multilayer CVD coatings on high strength steels10.1016/j.apsusc.2013.05.037 ↗
15. Nanomechanical properties of TiC, TiN and TiCN thin films using scanning probemicroscopy and nanoindentation10.1016/j.apsusc.2004.01.053 ↗
16. A study of Ti–C–N(H) and Ti:CNx(H) coatings grown with a magnetron sputtering/PECVD hybrid deposition process10.1016/j.surfcoat.2005.11.029 ↗
17. Tribologicalbehaviour of low carbon-containing TiAlCN coatings deposited by hybrid (DCMS/HiPIMS) technique10.1016/j.triboint.2020.106528 ↗
18. Auciello, O., and Engemann, J. (1993). Multicomponent and Multilayered Thin Films for Advanced Microtechnologies: Techniques, Fundamentals and Devices, Springer.10.1007/978-94-011-1727-2 ↗
19. The tribological characteristics of TiCN coating at elevated temperatures10.1016/j.wear.2004.12.031 ↗
20. Preparation and tribological behavior of TiN/a-C composite films deposited by DC magnetron sputtering10.1016/j.wear.2007.10.007 ↗
21. Deposition and characterization of Ti(C,N,O) coatings by unbalanced magnetron sputtering10.1016/S0257-8972(02)00494-2 ↗
22. Structural, mechanical and tribological behavior of TiCN, CrAlN and BCN coatings in lubricated and nonlubricated environments in manufactured devices10.1016/j.matchemphys.2020.123164 ↗
23. Bias effect on microstructure and mechanical properties of magnetron sputtered nanocrystalline titanium carbide thin films10.1016/j.tsf.2007.07.022 ↗
24. Influence of substrate negative bias on structure and properties of TiN coatings prepared by hybrid HIPIMS method10.1016/j.jmst.2014.06.002 ↗
25. Mechri, H., Saoula, N., and Madaoui, N. (2016, January 31). Friction and wear behaviors of TiCN coating treated by R.F. magnetron sputtering. Proceedings of the 7th African Conference on Non Destructive Testing ACNDT 2016 & the 5th International Conference on NDT and Materials Industry and Alloys (IC-WNDT-MI): Research Center in Industrial Technologies CRTI, Algiers, Algeria.
26. Influence of the C content on the mechanical and tribological properties of the TiCN coatings deposited by LAFAD technique10.1016/j.surfcoat.2011.02.032 ↗
27. The Influence of Plasma Nitriding Pre-Treatment on Tribological Properties of TiN Coatings Deposited by PACVD
28. Design and characterization of self-lubricating refractory high entropy alloy-based multilayered films10.1021/acsami.1c16949 ↗
29. Rakhadilov, B., Buitkenov, D., Sagdoldina, Z., Seitov, B., Kurbanbekov, S., and Adilkanova, M. (2021). Structural Features and Tribological Properties of Detonation Gun Sprayed Ti–Si–C Coating. Coatings, 11.10.3390/coatings11020141 ↗
30. Rakhadilov, B., Buitkenov, D., Idrisheva, Z., Zhamanbayeva, M., Pazylbek, S., and Baizhan, D. (2021). Effect of Pulsed-Plasma Treatment on the Structural-Phase Composition and Tribological Properties of Detonation Coatings Based on Ti–Si–C. Coatings, 11.10.3390/coatings11070795 ↗
31. Adhesion properties of calcium phosphate coatings on titanium
32. Magnetron sputtering of hard nanocomposite coatings and their properties10.1016/S0257-8972(01)01139-2 ↗
33. Toughness of hard nanostructured ceramic thin films10.1016/j.surfcoat.2006.07.020 ↗
34. On the significance of the H/E ratio in wear control: A nanocomposite coating approach to optimized tribological behavior10.1016/S0043-1648(00)00488-9 ↗
35. Atomistic insights into the deformation mechanism of a CoCrNi medium entropy alloy under nanoindentation10.1016/j.ijplas.2021.102997 ↗