journal article·2025-02-12Open access

Environmental Impact of Physical Vapour Deposition and Plasma-Enhanced Chemical Vapour Deposition Technologies for Deposition of Diamond-like Carbon Coatings for Green Tribology

Larissa Ihara, Guizhi Wu, Albano Cavaleiro, Ardian Morina, Liuquan Yang

Coatings· Volume 15· Issue 2

Abstract

With low friction and high hardness, diamond-like carbon (DLC) coatings are a prominent surface engineering solution for tribosystems in various applications. Their versatility stems from their varying composition, facilitated by different deposition techniques, which affect their properties. However, environmental impact is often overlooked in coating design. The objective of this paper is to assess the resource efficiency of four different common deposition techniques, thus identifying critical factors for sustainable DLC deposition. The coatings were deposited in one single chamber, enabling a direct comparison of the resource consumption of each technology. Expenditure of electric energy and consumables per volumetric output accounted for the environmental impact of manufacturing the coatings, which was evaluated across the indicators of damage to human health, damage to ecosystems, and resource scarcity. Electric energy use, dictated by deposition rate, was demonstrated to be the most significant factor contributing to the environmental impact. The environmental impact of PECVD and μW-PECVD was comparable and remarkably lower than that of dcMS and HiPIMS, the latter being the least energy efficient process, with the lowest output rate but highest energy expenditure. Thus, μW-PECVD could be considered the ‘greenest’ production method. These findings are consequential for coaters to efficiently produce good-quality DLCs with low environmental impact.
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Research context

OpenAlex topics: Diamond and Carbon-based Materials Research · Metal and Thin Film Mechanics · Tribology and Wear Analysis

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Institute of Functional Surfaces, School of Mechanical Engineering, University of Leeds, Leeds LS2 9JT, UK

CEMMPRE, ARISE, Department of Mechanical Engineering, University of Coimbra, Rua Luis Reis Santos, 3030-788 Coimbra, Portugal

Funding

European Union’s Horizon 2020 research and innovation programme under the Marie Skłodowska-Curie · EPSRC grant titled Advanced Coatings Platform to Drive New High Value Engineering Processes and Products · ortuguese Foundation for Science and Technology (FCT) in the framework of Strategic Funding

References (95)

Show source-provided references
1. History of diamond-like carbon films—From first experiments to worldwide applications10.1016/j.surfcoat.2014.01.031 ↗
2. Thick stress-free amorphous-tetrahedral carbon films with hardness near that of diamond10.1063/1.120515 ↗
3. Interpretation of Raman spectra of disordered and amorphous carbon10.1103/PhysRevB.61.14095 ↗
4. Empirical categorization and naming of “diamond-like” carbon films10.1016/0040-6090(86)90310-X ↗
5. Comparison of diamond-like carbon to diamond for applications10.1002/pssa.200879720 ↗
6. Evidence of graphitization of diamond-like carbon films during sliding wear10.1023/A:1018641304944 ↗
7. Electronic and atomic structure of diamond-like carbon10.1088/0268-1242/18/3/302 ↗
8. rf-plasma deposited amorphous hydrogenated hard carbon thin films: Preparation, properties, and applications10.1063/1.332613 ↗
9. Hydrogen-free amorphous carbon films: Correlation between growth conditions and properties10.1016/0925-9635(95)00445-9 ↗
10. Optimization of the Deposition Parameters of DLC Coatings with the IC-PECVD Method10.1080/02726351.2014.943380 ↗
11. DLC Coating by HiPIMS: The Influence of Substrate Bias Voltage10.1109/TPS.2013.2256800 ↗
12. Effects of Substrate Bias on Tribological Properties of Diamondlike Carbon Thin Films Deposited Via Microwave-Excited Plasma-Enhanced Chemical Vapor Deposition10.1115/1.4031995 ↗
13. Effects of substrate temperature on bonding structure and mechanical properties of amorphous carbon films10.1016/S0040-6090(03)01076-9 ↗
14. Effects of gas pressure and r.f. power on the growth and properties of magnetron sputter deposited amorphous carbon thin films10.1016/S0925-9635(01)00544-1 ↗
15. Effects of Varying Power and Argon Gas Flux on Tribological Properties and High-Speed Drilling Performance of Diamond-Like Carbon Coatings Deposited using High-Power Impulse Magnetron Sputtering System10.1007/s11665-020-05242-6 ↗
16. Effect of deposition pressure on the properties of DLC coatings deposited by bipolar-type PBII&D10.1002/sia.2707 ↗
17. Effects of Ar gas pressure on microstructure of DLC films deposited by high-power pulsed magnetron sputtering10.1016/j.vacuum.2012.07.004 ↗
18. Effect of sputtering pressure on the surface topography, structure, wettability and tribological performance of DLC films coated on rubber by magnetron sputtering10.1016/j.surfcoat.2018.05.012 ↗
19. Effect of deposition pressures on uniformity, mechanical and tribological properties of thick DLC coatings inside of a long pipe prepared by PECVD method10.1016/j.surfcoat.2019.07.030 ↗
20. Properties and coating rates of diamond-like carbon films produced by R.F. glow discharge of hydrocarbon gases10.1016/0040-6090(79)90117-2 ↗
21. Synthesis of a-C coatings by HPPMS using Ar, Ne and He as process gases10.1016/j.surfcoat.2016.07.099 ↗
22. Aijaz, A., Ferreira, F., Oliveira, J., and Kubart, T. (2018). Mechanical Properties of Hydrogen Free Diamond-Like Carbon Thin Films Deposited by High Power Impulse Magnetron Sputtering with Ne. Coatings, 8.10.3390/coatings8110385 ↗
23. Diamond-like carbon coatings deposited by deep oscillation magnetron sputtering in Ar-Ne discharges10.1016/j.diamond.2019.107521 ↗
24. Wear analysis of hydrogen-free diamond-like carbon coatings under a lubricated condition10.1016/j.wear.2012.11.046 ↗
25. Evaristo, M., Fernandes, F., and Cavaleiro, A. (2020). Room and High Temperature Tribological Behaviour of W-DLC Coatings Produced by DCMS and Hybrid DCMS-HiPIMS Configuration. Coatings, 10.10.3390/coatings10040319 ↗
26. Properties of Coatings: Comparisons of Electroplated, Physical Vapor Deposited, Chemical Vapor Deposited, and Plasma Sprayed Coatings10.1080/10426919708935157 ↗
27. Lundin, D., and Gudmundsson, J.T. (2019). Chapter 1—Introduction to magnetron sputtering. High Power Impulse Magnetron Sputtering: Fundamentals, Technologies, Challenges and Applications, Elsevier. [1st ed.].10.1016/B978-0-12-812454-3.00006-1 ↗
28. Optimization of deposition rate in HiPIMS by controlling the peak target current10.1088/0022-3727/48/49/495204 ↗
29. On the film density using high power impulse magnetron sputtering10.1016/j.surfcoat.2010.07.041 ↗
30. Lundin, D., and Gudmundsson, J.T. (2019). High Power Impulse Magnetron Sputtering: Fundamentals, Technologies, Challenges and Applications, Elsevier. [1st ed.].10.1016/B978-0-12-812454-3.00012-7 ↗
31. Mid-frequency deposition of a-C:H films using five different precursors10.1016/j.vacuum.2010.01.023 ↗
32. High rate deposition of hard a-C:H films using microwave excited plasma enhanced CVD10.1016/j.surfcoat.2010.12.047 ↗
33. The dependence of hardness on the density of amorphous alumina thin films by PECVD10.1016/S0040-6090(97)00404-5 ↗
34. Plasma deposition of optical films and coatings: A review10.1116/1.1314395 ↗
35. Martin, P.M. (2010). Chapter 9—Plasma-Enhanced Chemical Vapor Deposition of Functional Coatings. Handbook of Deposition Technologies for Films and Coatings: Science, Applications and Technology, Elsevier. [3rd ed.].10.1016/B978-0-8155-2031-3.00009-0 ↗
36. Microwave PECVD for large area coating10.1016/j.surfcoat.2005.02.061 ↗
37. Austin, L.B. (2014). Evaluation and Optimisation of Diamond-Like Carbon for Tribological Applications. [Ph.D. Thesis, University of Leeds].
38. Diamond-like amorphous carbon10.1016/S0927-796X(02)00005-0 ↗
39. Rapid thermal annealing effect on amorphous hydrocarbon film deposited by CH4/Ar dielectric barrier discharge plasma on Si wafer: Surface morphology and chemical evaluation10.1063/1.3116734 ↗
40. Igartua, A., Mendoza, G., Fernandez, X., Zabala, B., Alberdi, A., Bayon, R., and Aranzabe, A. (2020). Surface Treatments Solutions to Green Tribology. Coatings, 10.10.3390/coatings10070634 ↗
41. Evaluation and improvement of the greenness of plasma spraying through life cycle assessment and grey relational analysis10.1007/s11367-021-01910-4 ↗
42. Klocke, F., Döbbeler, B., Binder, M., Kramer, N., Grüter, R., and Lung, D. (2013, January 23–25). 12.3 Ecological evaluation of PVD and CVD coating systems in metal cutting processes. Proceedings of the 11th Global Conference on Sustainable Manufacturing—Innovative Solutions, Berlin, Germany.
43. Energy consumption and material fluxes in hard coating deposition processes10.1016/j.surfcoat.2016.04.062 ↗
44. Large-area uniform hydrogen-free diamond-like carbon films prepared by unbalanced magnetron sputtering for infrared anti-reflection coatings10.1016/j.diamond.2007.12.010 ↗
45. Piezoresistive properties and structure of hydrogen-free DLC films deposited by DC and pulsed-DC unbalanced magnetron sputtering10.1016/j.surfcoat.2011.10.004 ↗
46. Tribological performance of an H-DLC coating prepared by PECVD10.1016/j.apsusc.2016.04.184 ↗
47. Synergistic effect of plasma nitriding and bias voltage on the adhesion of diamond-like carbon coatings on M2 steel by PECVD10.1016/j.surfcoat.2019.06.014 ↗
48. Mattox, D.M. (2010). Handbook of Physical Vapor Deposition (PVD) Processing, Elsevier. [2nd ed.].10.1016/B978-0-8155-2037-5.00008-3 ↗
49. Verein-Deutscher-Ingenieure (1992). VDI 3198—Daimler-Benz Adhesion Test, Verein-Deutscher-Ingenieure.
50. (2016). Fine Ceramics (Advanced Ceramics, Advanced Technical Ceramics)—Determination of Adhesion of Ceramic Coatings by Scratch (Standard No. BS EN ISO 20502:2005).
51. Petrova, E., Tinchev, S., and Nikolova, P. (2011). Interference effects on the ID/IG ratio of the Raman spectra of diamond-like carbon thin films. arXiv.10.1088/1742-6596/223/1/012017 ↗
52. Quantitative measurements of sp3 content in DLC films with Raman spectroscopy10.1016/j.surfcoat.2010.08.093 ↗
53. Raman spectroscopy of hydrogenated amorphous carbons10.1103/PhysRevB.72.085401 ↗
54. (2015). Metallic Materials—Instrumented Indentation Test for Hardness and Materials Parameters—Part 1: Test Method (Standard No. BS EN ISO 14577-1:2015).
55. (2007). Metallic Materials—Instrumented Indentation Test for Hardness and Materials Parameters—Part 4: Test Method for Metallic and Non-Metallic Coatings (Standard No. BS EN ISO 14577-4:2007).
56. Improvements in the indentation method with a surface force apparatus10.1080/01418619608239707 ↗
57. An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments10.1557/JMR.1992.1564 ↗
58. Gegner, J. (2013). Introduction of the Ratio of the Hardness to the Reduced Elastic Modulus for Abrasion. Tri-bology—Fundamentals and Advancements, InTech.10.5772/3427 ↗
59. The hardness and Young’s modulus of amorphous hydrogenated carbon and silicon films measured with an ultralow load indenter10.1063/1.344462 ↗
60. (2006). Environmental Management—Life Cycle Assessment—Principles and Framework (Standard No. ISO 14040:2006).
61. (2006). Environmental Management—Life Cycle Assessment—Requirements and Guidelines (Standard No. ISO/TC 207/SC 5).
62. Hauschild, M.Z., and Huijbregts, M.A.J. (2015). Introducing Life Cycle Impact Assessment. Life Cycle Impact Assessment, Springer.10.1007/978-94-017-9744-3 ↗
63. ReCiPe2016: A harmonised life cycle impact assessment method at midpoint and endpoint level10.1007/s11367-016-1246-y ↗
64. The influence of positive pulses on HiPIMS deposition of hard DLC coatings10.1016/j.surfcoat.2018.11.001 ↗
65. Dalibón, E.L., Pecina, J.N., Moscatelli, M.N., Ramos, M.A.R., Trava-Airoldi, V.J., and Brühl, S.P. (2019). Mechanical and Corrosion Behaviour of DLC and TiN Coatings Deposited on Martensitic Stainless Steel. J. Bio- Tribo-Corrosion, 5.10.1007/s40735-019-0228-6 ↗
66. Review of multidimensional data processing approaches for Raman and infrared spectroscopy10.1140/epjti/s40485-015-0018-6 ↗
67. Evaluation of Carbon thin Films Using Raman Spectroscopy
68. Discharge runaway in high power impulse magnetron sputtering of carbon: The effect of gas pressure, composition and target peak voltage10.1088/1361-6463/aab590 ↗
69. A unified treatment of self-sputtering, process gas recycling, and runaway for high power impulse sputtering magnetrons10.1088/1361-6595/aa959b ↗
70. Controlled glow to arc transition in sputtering for high rate deposition of carbon films10.1016/j.diamond.2010.11.007 ↗
71. Vitelaru, C., Parau, A.C., Constantin, L.R., Kiss, A.E., Vladescu, A., Sobetkii, A., and Kubart, T. (2020). A Strategy for Alleviating Micro Arcing during HiPIMS Deposition of DLC Coatings. Materials, 13.10.3390/ma13051038 ↗
72. (2012). Geometrical Product Specifications (GPS)—Surface Texture: Areal. Part 2: Terms, Definitions and Surface Texture Parameters (Standard No. ISO 25178-2:2012).
73. Roughness parameters10.1016/S0924-0136(02)00060-2 ↗
74. Correlating and evaluating the functionality-related properties with surface texture parameters and specific characteristics of machined components10.1016/j.ijmecsci.2018.09.044 ↗
75. Tribological properties of DLC films deposited on steel substrate with various surface roughness10.1016/j.diamond.2004.06.037 ↗
76. Lubrication improvement and friction reduction of DLC-coated sliding surfaces by in-process structuring and post polishing10.1002/tt.55 ↗
77. Topography orientation effects on friction and wear in sliding DLC and steel contacts, part 3: Experiments under dry and lubricated conditions10.1016/j.wear.2021.204093 ↗
78. Correlation between standard roughness parameters skewness and kurtosis and tribological behaviour of contact surfaces10.1016/j.triboint.2011.11.008 ↗
79. Columnar microstructure in vapor-deposited thin films10.1016/0040-6090(77)90037-2 ↗
80. Hardness and surface roughness of hydrogenated amorphous carbon films synthesized by atmospheric pressure plasma enhanced CVD method with various pulse frequencies10.1016/j.surfcoat.2012.09.058 ↗
81. A review of adhesion test methods for thin hard coatings10.1116/1.573616 ↗
82. An overview of the potential of quantitative coating adhesion measurement by scratch testing10.1016/j.triboint.2005.04.013 ↗
83. Failure modes in scratch adhesion testing10.1016/0257-8972(91)90188-3 ↗
84. Modelling oxide spallation10.1080/09603409.1994.11689489 ↗
85. Evaluation of PVD nitride coatings, using impact, scratch and Rockwell-C adhesion tests10.1016/0040-6090(95)06934-8 ↗
86. Scratch adhesion testing of hard coatings10.1016/0040-6090(83)90019-6 ↗
87. Evaluation of Adhesion and Wear Resistance of DLC Films Deposited by Various Methods10.1002/ppap.200930004 ↗
88. Session 01: DLC coatings OA 01 P2009-245 evaluation of adhesion strength and wear resistance of DLC films10.1016/j.surfcoat.2010.07.068 ↗
89. (2025, January 25). Understanding Global Warming Potentials, United States Environmental Protection Agency (n.d.), Available online: https://www.epa.gov/ghgemissions/understanding-global-warming-potentials.
90. Lifetimes, direct and indirect radiative forcing, and global warming potentials of ethane (C2H6), propane (C3H8), and butane (C4H10)10.1002/asl.804 ↗
91. Low global warming potential (GWP) working fluids (WFs) for Organic Rankine Cycle (ORC) applications10.1016/j.egyr.2022.01.222 ↗
92. Patterson, R.M., Bornstein, M.I., and Garshick, E. (2023, October 31). Assessment of Acetylene as a Potential Air Pollution Problem: Volume I—Final Report, Available online: https://nepis.epa.gov/Exe/ZyPURL.cgi?Dockey=9101IJFQ.txt.
93. Mid frequency sputtering—A novel tool for large area coating
94. A review comparing cathodic arcs and high power impulse magnetron sputtering (HiPIMS)10.1016/j.surfcoat.2014.08.043 ↗
95. Physics of arcing, and implications to sputter deposition10.1016/j.tsf.2005.07.228 ↗